Sensing properties of Pt/Pd activated tungsten oxide films grown by simultaneous radio-frequency sputtering to reducing gases

Sensors and Actuators, B: Chemical

Volumn 175, Issue , 2012, Pages 53-59

  Zhang, Chao ^a   Boudiba, Abdelhamid ^a   Olivier, Marie Georges ^a,b   Snyders, Rony ^a,b   Debliquy, Marc ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b MATERIA NOVA RESEARCH CENTER   (Belgium)

Author keywords

Gas sensor; Palladium; Platinum; Sputtering; Tungsten oxide

Indexed keywords

AS-SPUTTERED FILMS; CHEMICAL COMPOSITIONS; RADIO FREQUENCY SPUTTERING; REDUCING GAS; SENSING CHARACTERISTICS; SENSING PROPERTY; TARGET GAS; THERMALLY TREATED FILMS; TUNGSTEN OXIDE; TUNGSTEN OXIDE FILMS; WORKING TEMPERATURES;

CHEMICAL SENSORS; OXIDE FILMS; OXIDES; PALLADIUM; PHOTOELECTRONS; SPUTTERING; TUNGSTEN COMPOUNDS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

PLATINUM;

EID: 84870242880     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.11.060     Document Type: Article

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