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Volumn 289, Issue , 2013, Pages 69-74
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Fabrication of dual-focus dual-layered microlens
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Author keywords
Integrated optics; Optical devices; Optical elements
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Indexed keywords
DRY ETCHING PROCESS;
DUAL LAYER;
FUSED QUARTZ;
MICRO-LENS;
MICRO-LENS ARRAYS;
NOVEL STRUCTURES;
SPHERICAL LENS;
DRY ETCHING;
INTEGRATED OPTICS;
OPTICAL DEVICES;
OPTICS;
QUARTZ;
MICROLENSES;
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EID: 84869499977
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/j.optcom.2012.09.076 Document Type: Article |
Times cited : (15)
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References (22)
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