Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power

Advanced Materials Research

Volumn 576, Issue , 2012, Pages 598-601

  Sauki, Nur Sa'adah Muhamad ^a   Herman, Sukreen Hana ^a   Ani, Mohd Hanafi ^b   Mahmood, Mohamad Rusop ^a  

^a UNIVERSITI TEKNOLOGI MARA   (Malaysia)

^b INTERNATIONAL ISLAMIC UNIVERSITY MALAYSIA   (Malaysia)

Author keywords

RF magnetron sputtering; RF power; Structural properties; Substrate temperatures; ZnO thin films

Indexed keywords

DIFFERENT SUBSTRATES; FLEXIBLE SUBSTRATE; RF-MAGNETRON SPUTTERING; RF-POWER; SUBSTRATE TEMPERATURE; TEFLON SUBSTRATE; VARIOUS SUBSTRATES; XRD; ZNO; ZNO THIN FILM;

DEPOSITION RATES; DEPOSITS; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; MANUFACTURE; METALLIC FILMS; OPTICAL FILMS; STRUCTURAL PROPERTIES; ZINC OXIDE;

SUBSTRATES;

EID: 84869433994     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMR.576.598     Document Type: Conference Paper

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