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Volumn , Issue , 2012, Pages 452-454

Real time analysis of ultra-thin CIGS thin film deposition

Author keywords

ellipsometry; gallium based semiconductor materials; optical variables measurement; photovoltaic cells; semiconductor film; thickness measurement

Indexed keywords

CIGS FILMS; CIGS THIN FILMS; CO-EVAPORATIONS; COPPER CONTENT; CU(IN , GA)SE; DIELECTRIC FUNCTIONS; GROWTH PROCESS; REAL TIME ANALYSIS; REAL TIME SPECTROSCOPIC ELLIPSOMETRY; ROUGHNESS EVOLUTION; SEMICONDUCTOR FILMS; THERMALLY OXIDIZED SILICON; ULTRA-THIN;

EID: 84869400857     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2012.6317655     Document Type: Conference Paper
Times cited : (1)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.