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Volumn , Issue , 2012, Pages 452-454
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Real time analysis of ultra-thin CIGS thin film deposition
a a b a a a b b b b a |
Author keywords
ellipsometry; gallium based semiconductor materials; optical variables measurement; photovoltaic cells; semiconductor film; thickness measurement
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Indexed keywords
CIGS FILMS;
CIGS THIN FILMS;
CO-EVAPORATIONS;
COPPER CONTENT;
CU(IN , GA)SE;
DIELECTRIC FUNCTIONS;
GROWTH PROCESS;
REAL TIME ANALYSIS;
REAL TIME SPECTROSCOPIC ELLIPSOMETRY;
ROUGHNESS EVOLUTION;
SEMICONDUCTOR FILMS;
THERMALLY OXIDIZED SILICON;
ULTRA-THIN;
ELLIPSOMETRY;
OPTICAL PROPERTIES;
OPTICAL VARIABLES MEASUREMENT;
PHOTOVOLTAIC CELLS;
SEMICONDUCTING SELENIUM COMPOUNDS;
SILICON OXIDES;
SPECTROSCOPIC ELLIPSOMETRY;
SURFACE ROUGHNESS;
THICKNESS MEASUREMENT;
COPPER;
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EID: 84869400857
PISSN: 01608371
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/PVSC.2012.6317655 Document Type: Conference Paper |
Times cited : (1)
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References (5)
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