Optimal reduction of a spatial monitoring grid: Proposals and applications in process control

Computational Statistics and Data Analysis

Volumn 58, Issue 1, 2013, Pages 407-419

  Borgoni, Riccardo ^a   Radaelli, Luigi ^b   Tritto, Valeria ^a   Zappa, Diego ^c  

^a UNIVERSITY OF MILANO BICOCCA   (Italy)

^b SPC and Robustness Group   (Italy)

^c UNIVERSITÀ CATTOLICA DEL SACRO CUORE   (Italy)

Author keywords

Kriging; Simulated annealing; Spatial sampling; Statistics for microelectronics

Indexed keywords

CRITICAL STEPS; DEPOSITION PROCESS; DIAGNOSTIC DEVICE; IN-PROCESS CONTROL; INTEGRATED CIRCUIT MANUFACTURING; KRIGING; MANUFACTURING PROCESS; MONITORING GRIDS; OPTIMAL REDUCTIONS; SPATIAL PREDICTION; SPATIAL SAMPLING; SUB-GRIDS;

MICROELECTRONICS; SAMPLING; SILICA; SIMULATED ANNEALING; THICKNESS MEASUREMENT;

PROCESS CONTROL;

EID: 84869095797     PISSN: 01679473     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.csda.2012.08.007     Document Type: Article

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