Fabrication and model validation for CMUTs operated in permanent contact mode

IEEE International Ultrasonics Symposium, IUS

Volumn , Issue , 2011, Pages 1016-1019

  Ho, Min Chieh ^a   Kupnik, Mario ^b   Vaithilingam, Srikant ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

^b BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

CMUT; Fabrication; permanent contact mode; thick BOX process; ultrasonic flow meter; wide pressure range

Indexed keywords

BOTTOM ELECTRODES; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; CMUT; CONTACT DEVICE; CONTACT MODES; CONTACT RADIUS; DIRECT WAFER BONDING; FABRICATED DEVICE; LASER VIBROMETERS; MODE FREQUENCIES; MODEL VALIDATION; PLATE PROFILE; PRESSURE RANGES; STATIC AND DYNAMIC BEHAVIORS; THICK BOX PROCESS; THICK BURIED OXIDES; ULTRASONIC FLOW; VOLTAGE CONDITIONS;

BIAS VOLTAGE; FINITE ELEMENT METHOD; MODAL ANALYSIS; NATURAL FREQUENCIES; ULTRASONIC FLOWMETERS; ULTRASONIC TRANSDUCERS;

FABRICATION;

EID: 84869032727     PISSN: 19485719     EISSN: 19485727     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2011.0249     Document Type: Conference Paper

References (5)

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2. M.-C. Ho, M. Kupnik, and B. T. Khuri-Yakub, "FEA of CMUTs suitable for wide gas pressure range applications," in Proc. IEEE Ultrasonics Symposium, pp. 1234-1237, 2010.
3. M. Kupnik, S. Vaithilingam, K. Torashima, I. O. Wygant, and B. T. Khuri-Yakub, "CMUT fabrication based on a thick buried oxide layer," in Proc. IEEE Ultrasonics Symposium, pp. 547-550, 2010.
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