FEA of CMUTs suitable for wide gas pressure range applications

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2010, Pages 1234-1237

  Ho, Min Chieh ^a   Kupnik, Mario ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

CMUT; FEA; high pressure; ultrasonic flow meter

Indexed keywords

CMUT; COUPLING EFFICIENCY; DC BIAS; DC BIAS VOLTAGE; DESIGN GEOMETRY; ELEMENT ANALYSIS; GAS PRESSURES; HIGH PRESSURE; OPERATION MODE; OPERATIONAL MODES; PARTIAL ELECTRODES; PRESSURE RANGES; ULTRASONIC FLOW; ULTRASOUND TRANSDUCERS;

FLOW MEASUREMENT; INTERNET PROTOCOLS; MODAL ANALYSIS; STATIC ANALYSIS; TRANSDUCERS; ULTRASONIC FLOWMETERS; ULTRASONICS;

ULTRASONIC TRANSDUCERS;

EID: 80054059319     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2010.5935678     Document Type: Conference Paper

References (10)

1. K. S. Mylvaganam, 'High-rangeability ultrasonic gas flowmeter formonitoring flare gas', IEEE Trans. on Ultrasonics, Ferroelectric, and FrequencyControl, vol. 36, no. 2, pp. 144-149, March 1989.
2. M. Kupnik et al. 'Adaptive asymmetric double-path ultrasonic transit-timegas flow meter', Proc. IEEE Ultrasonics Symposium, 2006, pp. 2429 - 2432.
3. M. Kupnik, et al., "CMUT fabrication based on a thick buried oxidelayer", Proc. IEEE Ultrasonics Symposium, 2010, to be published.
4. Y. Huang, "Capacitive micromachined ultrasonic transducers (CMUTS)built with wafer-bonding technology", Section 4.3.2., Ph.D. dissertation,Dept. Elect. Eng., Stanford University, Stanford, CA, March 2005.
5. B. Bayram et al., "A new regime for operating capacitivemicromachined ultrasonic transducers", IEEE Trans. on Ultrasonics,Ferroelectric, and Frequency Control, vol. 50, no. 9, Sep 2003, p. 1184-1190.
6. P. Kirksen, "Pre-collapsed CMUT with mechanical collapsedretention", International Patent WO 2010/097729 A1, Sep. 02, 2010.
7. P. Kirksen, "Production of pre-collapsed capacitive micro-machinedultrasonic transducers and applications thereof", International Patent WO2009/037655 A2, March 26, 2009.
8. A. Lohfink and P.-C. Eccardt, 'Linear and nonlinear equivalent circuitmodeling of CMUTs', IEEE Trans. on Ultrasonics, Ferroelectric, and FrequencyControl, vol. 52, no. 12, Dec. 2005, p. 2163-2172.
9. M. Kupnik et al. 'Finite element analysis of stress stiffening effects inCMUTs', Proc. IEEE Ultrasonics Symposium, 2008, pp. 487 - 490.
10. D. Berlincourt, "Piezoelectric crystals and ceramics, "Ultrasonic Transducer Materials. O. E. Mattiat, Ed. New York: Plenum Press,1971, p. 69-71.