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Volumn 45, Issue 7, 2012, Pages 231-237
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The effect of oxygen species on the ZnO TFT prepared by atmosphere pressure plasma jet
a b,c b d b e e |
Author keywords
[No Author keywords available]
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Indexed keywords
ATMOSPHERIC PRESSURE;
ENERGY GAP;
II-VI SEMICONDUCTORS;
METALLIC FILMS;
OPTICAL FILMS;
OXIDE MINERALS;
OXYGEN VACANCIES;
PARTIAL PRESSURE;
PLASMA JETS;
PRESSURE EFFECTS;
THIN FILM TRANSISTORS;
THIN FILMS;
THRESHOLD VOLTAGE;
ZINC OXIDE;
ATMOSPHERE PRESSURE;
ATMOSPHERIC PRESSURE PLASMA JETS;
BOTTOM GATE THIN FILM TRANSISTORS;
FIELD-EFFECT MOBILITIES;
OXYGEN PARTIAL PRESSURE;
RANDOM ORIENTATIONS;
SUBTHRESHOLD SWING;
SWITCHING BEHAVIORS;
WIDE BAND GAP SEMICONDUCTORS;
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EID: 84869013856
PISSN: 19385862
EISSN: 19386737
Source Type: Conference Proceeding
DOI: 10.1149/1.3701543 Document Type: Conference Paper |
Times cited : (1)
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References (7)
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