Reproducible Silicon Nanowire Sensors Platform

BioNanoScience

Volumn 2, Issue 4, 2012, Pages 218-222

  Prajesh, Rahul ^a   Agarwal, Ajay ^a  

^a CENTRAL ELECTRONICS ENGINEERING RESEARCH INSTITUTE   (India)

Author keywords

CMOS compatible; Current modulation; Silicon nanowire; Top down

Indexed keywords

BACK-GATE; BIOCHEMICAL ANALYSIS; CMOS COMPATIBLE; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; CURRENT MODULATION; FABRICATION TECHNIQUE; MICRON DIMENSION; NANOWIRE SENSORS; SILICON CONSUMPTION; SILICON NANOWIRES; SILICON WIRES; THERMAL OXIDATION PROCESS; TOP-DOWN APPROACH; TOPDOWN;

MODULATION; NANOWIRES; SELF ASSEMBLY; SILICON;

NANOSENSORS;

METAL OXIDE; NANOWIRE; SILICON;

ARTICLE; MEASUREMENT REPEATABILITY; OXIDATION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; SENSOR; SIMULATION;

EID: 84868680029     PISSN: 21911630     EISSN: 21911649     Source Type: Journal    
DOI: 10.1007/s12668-012-0058-1     Document Type: Article

References (8)

1. Cui, Y., Wei, Q., Park, H., & Lieber, C. M. (2001). Science, 293, 1289.
2. Agarwal, A., Buddharaju, K., Lao, I. K., Singh, N., Balasubramanian, N., & Kwong, D. L. (2008). Sensors and Actuators A, 145-146, 207-213.
3. Agarwal, A., Balasubramanian, N., Ranganathan, N., & Kumar, R. (2006). Int J Nanosci, 5, 445.
4. Agarwal, A., Liow, T.-Y., Kumar, R., Tung, C. H., Balasubramanian, N. D., Kwong, L. (2005). In Proc. of the SSDM'05 Conf., Kobe, 1016.
5. Yiying, W., & Peidong, Y. (2001). Journal of the American Chemical Society, 123, 3165-3166.
6. Schubert, L., Werner, P., & Gösele, U. (2005). Nano Letters, 5.
7. Kedzierski, J., & Bokor, J. (1997). J Vac Sci Technol B, 15, 2825.
8. Chiou, Y. L., Sow, C. H., & Ports, K. (1989). IEEE Electron Device Lett, 10.