Silicon nanowire sensor array using top-down CMOS technology

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 207-213

  Agarwal, Ajay ^a   Buddharaju, K ^a   Lao, I K ^a   Singh, N ^a   Balasubramanian, N ^a   Kwong, D L ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

CMOS compatible; Field effect transistors (FET); Nano temperature sensor; Silicon nanowires

Indexed keywords

CHEMICAL SENSORS; COMPUTER NETWORKS; DETECTORS; ELECTRIC WIRE; ELECTRON TUBE DIODES; FLUIDICS; HEALTH; MICROFLUIDICS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOWIRES; NONMETALS; RESONANT TUNNELING; SEMICONDUCTOR DIODES; SENSORS; SILICON; STANDARDS; TECHNOLOGY; TEMPERATURE; TEMPERATURE SENSORS;

BIO CHEMICAL SENSORS; BUFFER SOLUTIONS; CMOS TECHNOLOGIES; ELSEVIER (CO); HIGHLY SENSITIVE; LAB-ON-CHIP DEVICES; MICRO FLUIDICS; NANOWIRE ARRAYS; REAL TIME ANALYSIS; RESISTANCE TEMPERATURE DETECTOR (RTD); REVERSE BIASES; SILICON NANOWIRES (SINWS); SILICON-NANOWIRE; STANDARD CMOS; STATISTICAL ANALYSIS (IGC: E4/K7); SURFACE MODIFICATIONS; TEMPERATURE COEFFICIENT OF RESISTANCE (TCR); TEMPERATURE DETECTORS; TEMPERATURE RANGES; TOP-DOWN;

NANOSENSORS;

EID: 44949224381     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.12.019     Document Type: Article

References (11)

1. Cui Y., Wei Q., Park H., and Lieber C.M. Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species. Science 293 (2001) 1289-1292
2. Gruner G. Carbon nanotube transistors for biosensing applications. Anal. Bioanal. Chem. 384 (2006) 322-335
3. 2 nanoribbon nanosensors at room temperature. Angew. Chem. Int. Ed. 41 (2002) 2405-2408
4. 3 nanowires as chemical sensors. Appl. Phys. Lett. 82 (2003) 1613-1615
5. Li Z., Chen Y., Li X., Kamins T.I., Nauka K., and Williams R.S. Sequence-specific label-free DNA sensors based on silicon nanowires. Nano Lett. 4 (2004) 245
6. Gau C., Chan C.L., Shiau S.H., Liu C.W., and Ting S.H. Nano temperature sensor using selective lateral growth of carbon nanotube between electrodes. Proceedings of the Fifth IEEE Conference on Nanotechnology. Nagoya, Japan (2005)
7. Gao Y., and Bando Y. Carbon nanothermometer containing gallium. Nature 415 (2002) 599
8. Arai F., Ng C., Liu P., Dong L., Imaizumi Y., Maeda K., Maruyama H., Ichikawa A., and Fukuda T. Ultra-small site temperature sensing by carbon nanotube thermal probes. Proceedings of the Fourth IEEE Conference on Nanotechnology (2004) 146-148
9. El-Shimy H.M.M., Arai F., and Fukuda T. Three-dimensional nano temperature sensors fabricated using focused ion beam chemical vapour deposition. IEEE (2006) 270-272
10. Agarwal A., Liow T.-Y., Kumar R., Tung C.H., Balasubramanian N., and Kwong D.L. Transport and back-gated field effect characteristics of Si nanowires formed by stress-limited oxidation. Proceedings of the SSDM'05 Conference. Kobe (2005) 1016-1017
11. Chuang H.M., et al. Temperature dependent characteristics of polysilicon and diffused resistors. IEEE Trans. Electron. Devices 50 (2003) 1413