Defeating the trade-off between process complexity and electrical performance with vertical zinc oxide transistors

Applied Physics Letters

Volumn 101, Issue 18, 2012, Pages

  Nelson, S F ^a   Levy, D H ^a   Tutt, L W ^a  

^a EASTMAN KODAK COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL LENGTH; ELECTRICAL PERFORMANCE; GATE METALS; LOW VOLTAGES; LOW-TEMPERATURE PROCESS; METAL OXIDE SEMICONDUCTOR; MOBILITY VALUE; ON/OFF CURRENT RATIO; PROCESS COMPLEXITY; SHORT-CHANNEL DEVICES; VERTICAL TRANSISTORS;

MOS DEVICES; THIN FILM TRANSISTORS;

ZINC OXIDE;

EID: 84868651419     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4765340     Document Type: Article

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