A novel gas flow sensing application using piezoelectric ZnO thin films deposited on Phynox alloy

Sensors and Actuators, A: Physical

Volumn 187, Issue , 2012, Pages 194-200

  Joshi, Sudeep ^a   Parmar, Mitesh ^a   Rajanna, K ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Piezoelectricity; Sensing; X ray diffraction; ZnO thin films

Indexed keywords

C-AXIS ORIENTATIONS; COEFFICIENT VALUES; FLOW SENSING; OUTPUT VOLTAGES; RF-POWER; SENSING; SENSING ELEMENTS; SENSING LAYERS; ZNO FILMS; ZNO THIN FILM;

ALLOYS; CERIUM ALLOYS; CRYSTALLOGRAPHY; DEPOSITS; FLOW RATE; OPTICAL FILMS; PIEZOELECTRICITY; SURFACE ROUGHNESS; X RAY DIFFRACTION;

METALLIC FILMS;

EID: 84868569372     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.08.032     Document Type: Article

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