Stress-driven AlN cantilever-based flow sensor for fish lateral line system

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2376-2378

  Qualtieri, A ^a   Rizzi, F ^a   Todaro, M T ^b   Passaseo, A ^b   Cingolani, R ^a   De Vittorio, M ^a,b  

^a ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

^b NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

Author keywords

Artificial hair cell; Cilium; Piezoresistor; Stress driven cantilever

Indexed keywords

ALN; APPLIED FORCES; CANTILEVER ARRAYS; CILIUM; ELECTRICAL MEASUREMENT; ETCHING PROCESS; FABRICATED STRUCTURES; FLOW-SENSORS; HAIR CELLS; MICROMACHINING TECHNIQUES; MULTI-LAYERED; NICHROME; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTOR; STRESS-DRIVEN CANTILEVER;

ALUMINUM NITRIDE; FABRICATION; MOLYBDENUM; NITRIDES; PHOTOLITHOGRAPHY; SENSORS;

NANOCANTILEVERS;

EID: 79960048270     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.091     Document Type: Conference Paper

References (9)

1. R.G. Northcutt The Mechanosensory Lateral Line: Neurobiology and Evolution 1989 Springer New York
2. A.B.A. Kroese, and N.A.M. Schellart J. Neurophysiol. 68 1992 2212
3. Y. Yang, J. Chen, J. Engel, S. Pandya, N. Chen, C. Tucker, S. Coombs, D.L. Jones, and C. Liu PNAS 103 2006 18891
4. E. Kalvesten, C. Vieider, L. Lofdahl, and G. Stemme Sens. Actuators A 52 1996 51
5. N. Svedin, E. Kalvesten, E. Stemme, and G. Stemme J. Micromech. Sys. 7 3 1998 303
6. Z. Fan, J. Chen, J. Zou, D. Bullen, C. Liu, and F. Delcomyn J. Micromech. Microeng. 12 2002 655
7. A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier Sens. Actuators A 141 2008 565
8. G.R. Higson J. Sci. Instrum. 41 1964 405
9. C. Giordano, I. Ingrosso, M. Grande, A. Qualtieri, M. Pugliese, M.T. Todaro, V. Tasco, and M. De Vittorio A. Passaseo Ferroelectrics 389 1 2009 75