Amorphous SiCN diaphragm for transmission electron microscope with environmental-cell fabricated by plasma-enhanced chemical vapor deposition

Vacuum

Volumn 88, Issue 1, 2013, Pages 83-87

  Matsutani, Takaomi ^a   Yamasaki, Kayo ^a   Tsutsui, Hidenori ^a   Miura, Takuya ^b   Kawasaki, Tadahiro ^b  

^a KINKI UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

a SiCN; Catalytic gold nanoparticles; Diaphragm; Environmental cell; Plasma enhanced chemical vapor deposition; Transmission electron microscopy

Indexed keywords

A-SICN; AMORPHOUS SILICON CARBON NITRIDE; CATALYTIC GOLD NANOPARTICLES; CHARGE-UP; ENVIRONMENTAL-CELL; GOLD NANOPARTICLES; IN-SITU; REACTION GAS; TEM SYSTEM; TRANSMISSION ELECTRON MICROSCOPE;

CARBON FILMS; CELLS; COPPER; CYTOLOGY; DIAPHRAGMS; GOLD; METAL NANOPARTICLES; NITRIDES; PHOTOELECTRONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY; VAPORS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 84867857295     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2012.03.033     Document Type: Article

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