Fabrication of nanoscale zero-mode waveguides using microlithography for single molecule sensing

Nanotechnology

Volumn 23, Issue 45, 2012, Pages

  Teng, Chu Hsiang ^a   Lionberger, Troy A ^a   Zhang, Jin ^a   Meyhöfer, Edgar ^a   Ku, Pei Cheng ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE EMISSION; NANO SCALE; NANO-APERTURES; PROCESSING TECHNIQUE; RAPID FABRICATION; SINGLE MOLECULE;

MOLECULES; WAVEGUIDES;

FABRICATION;

EID: 84867832900     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/45/455301     Document Type: Article

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