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Journal of Alloys and Compounds

Volumn 547, Issue , 2013, Pages 147-151

Low dimensional fabrication of giant dielectric CaCu3Ti 4O12 through soft e-beam lithography

(2) Banerjee, Nirupam a,b Krupanidhi, S B a,b

a INDIAN INSTITUTE OF SCIENCE (India)

b UNIVERSITY OF TWENTE (Netherlands)

Author keywords

High dielectric material; Nano fabrication; Soft lithography

Indexed keywords

CHEMICAL PURITY; CRYSTALLINE NATURE; E-BEAM LITHOGRAPHY; ENERGY DISPERSIVE X RAY SPECTROSCOPY; HIGH DIELECTRIC MATERIALS; INORGANIC METALS; LOW DIMENSIONAL; LOW DIMENSIONAL STRUCTURE; PHASE FORMATIONS; PRECURSOR SOLUTIONS; SELECTED AREA ELECTRON DIFFRACTION; SI (1 1 1); SOFT LITHOGRAPHY; SOL-GEL PRECURSORS; TECHNOLOGICAL APPLICATIONS; TRANSMISSION ELECTRON MICROSCOPY TEM;

AUTOMOBILE MANUFACTURE; ELECTRON BEAMS; ELECTRON DIFFRACTION; FABRICATION; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; SOL-GELS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY SPECTROSCOPY;

DIELECTRIC MATERIALS;

EID: 84867594335 PISSN: 09258388 EISSN: None Source Type: Journal
DOI: 10.1016/j.jallcom.2012.08.088 Document Type: Article

Times cited : (14)

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