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Volumn 89, Issue , 2012, Pages 163-165
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Microwave assisted low temperature encapsulation of Ag films by Cu reactions using Ag-Cu alloy structures
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Author keywords
Electrical properties; Oxidation; Segregation; Thin films
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Indexed keywords
AG FILMS;
AG-CU ALLOYS;
ALLOY FILM;
CU ALLOY;
ENCAPSULATION LAYER;
FOUR-POINT PROBE MEASUREMENTS;
LOW TEMPERATURE PROCESSING;
LOW TEMPERATURES;
MAXIMUM TEMPERATURE;
MICROWAVE ASSISTED;
MICROWAVE CAVITY;
PREFERENTIAL ORIENTATION;
RUTHERFORD BACK-SCATTERING SPECTROMETRY;
COPPER;
ELECTRIC PROPERTIES;
OXIDATION;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SEGREGATION (METALLOGRAPHY);
TEMPERATURE;
THIN FILMS;
X RAY DIFFRACTION;
SILVER;
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EID: 84867550289
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2012.08.075 Document Type: Article |
Times cited : (5)
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References (11)
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