Microwave heating of thin Au film

Materials Transactions

Volumn 48, Issue 3, 2007, Pages 531-537

  Sueyoshi, Hidekazu ^a   Kakiuchi, Shigeki ^a  

^a KAGOSHIMA UNIVERSITY   (Japan)

Author keywords

Evaporation; Film thickness; Heating; Microstructure; Microwave irradiation; Sputtering; Thin gold film

Indexed keywords

MICROWAVE ABSORPTION; THIN GOLD FILMS;

ATOMIC FORCE MICROSCOPY; EVAPORATION; FILM THICKNESS; GOLD; MICROSTRUCTURE; MICROWAVE HEATING; SPUTTERING; X RAY DIFFRACTION;

THIN FILMS;

EID: 34247344785     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.48.531     Document Type: Article

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