Polymer/silicon hard magnetic micromirrors

Journal of Microelectromechanical Systems

Volumn 21, Issue 5, 2012, Pages 1098-1106

  Weber, Niklas ^a   Hertkorn, Daniel ^a   Zappe, Hans ^a   Seifert, Andreas ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Hard magnetic layers; magnetic actuation; micro optics; micromirror; polymers

Indexed keywords

DEFLECTION ANGLES; ELECTRICAL WIRING; HARD MAGNETIC PROPERTY; LOW MAGNETIC FIELDS; MAGNETIC ACTUATION; MAGNETIC LAYERS; MICRO MIRROR; MICROCOILS; POLYMER MICROELECTROMECHANICAL SYSTEM; ROTATING PLATFORM;

ELECTROMECHANICAL DEVICES; MAGNETIC MIRRORS; MAGNETIC PROPERTIES; MEMS; MICROOPTICS; MIRRORS;

POLYMERS;

EID: 84867099594     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2203100     Document Type: Article

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