Electrical characterization of carbon nanotube vertical interconnects with different lengths and widths

2012 IEEE International Interconnect Technology Conference, IITC 2012

Volumn , Issue , 2012, Pages

  Vollebregt, Sten ^a,c   Ishihara, Ryoichi ^a   Tichelaar, Frans ^b   Van Der Cingel, Johan ^a   Beenakker, Kees ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c NONE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

TEMPERATURE;

BOTTOM UP; ELECTRICAL CHARACTERIZATION; LOW TEMPERATURES; TOP CONTACT;

CARBON NANOTUBES;

EID: 84866654446     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.2012.6251578     Document Type: Conference Paper

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