Development of a conductivity microsensor considering electric double layer capacity

Microelectronic Engineering

Volumn 97, Issue , 2012, Pages 387-390

  Janou, Jií ^a   Beránek, Pavel ^a   Pibyl, Michal ^a,b   Nita, Dalimil ^a,b  

^a INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

^b UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Conductivity sensors; Electric double layer; Impedance spectroscopy; Micro electrodes; Micro fluidics

Indexed keywords

CONDUCTIVE PARTICLE; CONDUCTIVITY MEASUREMENTS; CONDUCTIVITY SENSORS; CONSTANT PHASE ELEMENT; CONTROL ELECTRONICS; ELECTRIC DOUBLE LAYER; ELECTRODE DIMENSIONS; EQUIVALENT RC CIRCUIT; GOLD MICROELECTRODES; IMPEDANCE RESPONSE; IMPEDANCE SPECTROSCOPY; IMPEDANCE SPECTRUM; ION CONCENTRATIONS; MANUFACTURING COST; NOVEL DESIGN; SCALE-DOWN; SENSOR CHARACTERISTICS; SENSOR DESIGNS; THREE ELECTRODE; UV LITHOGRAPHY;

FLUIDICS; MICROELECTRODES; SENSORS;

ELECTROCHEMISTRY;

EID: 84865515128     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.05.008     Document Type: Article

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