Development of novel dual-axis sensing gyroscope using surface acoustic wave

Microelectronic Engineering

Volumn 97, Issue , 2012, Pages 259-264

  Oh, Haekwan ^a   Lee, Ki Jung ^a   Yang, Sang Sik ^a   Lee, Keekeun ^a  

^a Ajou University   (South Korea)

Author keywords

Coriolis force; Dual axis sensing; Progressive wave; SAW gyroscope; SAW oscillator

Indexed keywords

CORIOLIS; DUAL AXIS; FORCE DETECTION; MULTI-AXIS; ORTHOGONAL DIRECTIONS; PROGRESSIVE WAVES; SAW OSCILLATORS; SENSOR SURFACES; SENSOR SYSTEMS; SILICON SUBSTRATES; SIMULTANEOUS DETECTION; SURFACE ACOUSTIC WAVES; UNDESIRABLE FACTORS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; CORIOLIS FORCE; PHOTORESISTS; SENSORS; SUBSTRATES;

GYROSCOPES;

EID: 84865501653     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.02.022     Document Type: Article

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