In situ removal of carbon contamination from optics in a vacuum ultraviolet and soft X-ray undulator beamline using oxygen activated by zeroth-order synchrotron radiation

Journal of Synchrotron Radiation

Volumn 19, Issue 5, 2012, Pages 722-727

  Toyoshima, Akio ^a   Kikuchi, Takashi ^a   Tanaka, Hirokazu ^a   Adachi, Jun Ichi ^a   Mase, Kazuhiko ^a   Amemiya, Kenta ^a  

^a INSTITUTE OF MATERIALS STRUCTURE SCIENCE   (Japan)

Author keywords

carbon contamination; in situ cleaning; optics; soft X ray; vacuum ultraviolet

Indexed keywords

BASE PRESSURE; BEAM LINES; CARBON CONTAMINATION; CARBON K-EDGE; EXPERIMENTAL DATA; IN-SITU; IN-SITU CLEANING; IN-SITU METHODS; NEAR EDGE X-RAY ABSORPTION FINE STRUCTURES; PHOTON INTENSITIES; RESONANT PHOTOEMISSION; SOFT X-RAY; SOFT X-RAY EMISSIONS; VACUUM ULTRAVIOLETS;

CONTAMINATION; EMISSION SPECTROSCOPY; OPTICS; OXYGEN; PHOTONS; SYNCHROTRON RADIATION; VACUUM; X RAY OPTICS;

CARBON;

EID: 84865420653     PISSN: 09090495     EISSN: 16005775     Source Type: Journal    
DOI: 10.1107/S0909049512024971     Document Type: Article

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