A statistical approach to delta layer depth profiling

Surface and Interface Analysis

Volumn 44, Issue 9, 2012, Pages 1243-1248

  Wucher, Andreas ^a   Krantzman, Kristin D ^b  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b Department of Teacher Education and Department of Sociology and Anthropology   (United States)

Author keywords

delta layers; depth resolution; molecular depth profiling; response function; statistical sputtering model

Indexed keywords

DELTA LAYERS; DEPTH RESOLUTION; MOLECULAR DEPTH PROFILING; RESPONSE FUNCTIONS; SPUTTERING MODELS;

EROSION; EXPERIMENTS; MOLECULAR DYNAMICS; MONOLAYERS;

DEPTH PROFILING;

EID: 84865236822     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.4931     Document Type: Article

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