The radial contraction of argon microwave plasmas studied by Thomson scattering

Journal of Physics D: Applied Physics

Volumn 45, Issue 34, 2012, Pages

  Carbone, E A D ^a   Hubner S ^a   Palomares, J M ^a   Van Der Mullen, J J A M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON PLASMAS; ELECTRON DENSITY PROFILES; FREE PARAMETERS; INTERMEDIATE PRESSURES; LOW PRESSURES; MICROWAVE PLASMA; PLASMA MODE; PRESSURE RANGES; RADIAL ELECTRON DENSITY; RADIAL PROFILES; SPATIALLY RESOLVED; THOMSON SCATTERING;

PHYSICS;

LIGHT SCATTERING;

EID: 84865084141     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/34/345203     Document Type: Article

References (45)

1. Moisan M and Pelletier J 1992 Microwave Excited Plasmas (Plasma Technology vol 4) (Amsterdam: Elsevier)
2. Ferreira C M and Moisan M 1993 Microwave Discharges: Fundamentals and Applications (New York: Plenum)
3. Geittner P, Küppers D and Lydtin H 1976 Low-loss optical fibres prepared by plasma-activated chemical vapor deposition (CVD) Appl. Phys. Lett. 28 645-6
4. Schlemm H, Mai A, Roth S, Roth D, Baumgärtner K M and Muegge H 2003 Industrial large scale silicon nitride deposition on photovoltaic cells with linear microwave plasma sources Proc. 8th Int. Conf. Plasma Surface Engineering Surf. Coat. Technol. (Garmisch-Partenkirchen, Germany,) 208-11
5. Airoldi V T, Borges C F M, Moisan M and Guay D 1997 High optical transparency and good adhesion of diamond films deposited on fused silica windows with a surface-wave sustained plasma Appl. Opt. 36 4400-2
6. Meyer-Plath A A, Finke B, Schröder K and Ohl A 2003 Pulsed and cw microwave plasma excitation for surface functionalization in nitrogen-containing gases Surf. Coat. Technol. 174-175 877-81
7. Chau J L H and Kao C-C 2009 Synthesis of silica nanopowders in a microwave plasma J. Non-Cryst. Solids 355 2448-50
8. Kim J H, Hong Y C and Uhm H S 2007 Synthesis of oxide nanoparticles via microwave plasma decomposition of initial materials Surf. Coat. Technol. 201 5114-20
9. Feichtinger J, Schulz A, Walker M and Schumacher U 2003 Sterilisation with low-pressure microwave plasmas Surf. Coat. Technol. 174-175 564-9
10. 2 discharges J. Phys. D: Appl. Phys. 34 1745
11. De Jaegere S, Willems M and Vinckier C 1982 Interactions between afterglow products of microwave-induced plasmas and solids J. Phys. Chem. 86 3569-77
12. Lieberman M A and Lichtenberg A J 2005 Principle of Plasma Discharges and Material Processing (Hoboken, NJ: Wiley)
13. Kabouzi Y, Calzada M D, Moisan M, Tran K C and Trassy C 2002 Radial contraction of microwave-sustained plasma columns at atmospheric pressure J. Appl. Phys. 91 1008
14. Petrov G and Ferreira C 1999 Numerical modeling of the constriction of the dc positive column in rare gases Phys. Rev. E 59 3571-82
15. Ferreira C M 1983 Modelling of a low-pressure plasma column sustained by a surface wave J. Phys. D: Appl. Phys. 16 1673-85
16. Moisan M, Zakrzewski Z and Pantel R 1979 The theory and characteristics of an efficient surface wave launcher (surfatron) producing long plasma columns J. Phys. D: Appl. Phys. 12 219
17. de Vries N, Palomares J M, van Harskamp W J, Iordanova E I, Kroesen G M W and van der Mullen J J A M 2008 Thomson scattering measurements on a low pressure surface wave sustained plasma in argon J. Phys. D: Appl. Phys. 41 105209
18. Palomares J M, Iordanova E, van Veldhuizen E M, Baede L, Gamero A, Sola A and van der Mullen J J A M 2010 Thomson scattering on argon surfatron plasmas at intermediate pressures: axial profiles of the electron temperature and electron density Spectrochim. Acta B 65 225-33
19. Carbone E A D, Hübner S, Iordanova E, Palomares J M and van der Mullen J J A M 2011 Thomson scattering imaging of the very end of surfatron plasmas IEEE Trans. Plasma Sci. 39 2558-9
20. Castaos Martinez E, Kabouzi Y, Makasheva K and Moisan M 2004 Modeling of microwave-sustained plasmas at atmospheric pressure with application to discharge contraction Phys. Rev. E 70 1-12
21. Castaos Martínez E, Moisan M and Kabouzi Y 2009 Achieving non-contracted and non-filamentary rare-gas tubular discharges at atmospheric pressure J. Phys. D: Appl. Phys. 42 012003
22. Golubovskii Yu B, Nekuchaev V, Gorchakov S and Uhrlandt D 2011 Contraction of the positive column of discharges in noble gases Plasma Sources Sci. Technol. 20 053002
23. Jimenez Diaz M, van Dijk J, Carbone E A D and van der Mullen J J A M 2012 A two dimensional model for the plasma-electromagnetic interaction in the Surfatron source J. Phys. D: Appl. Phys. 45 335204
24. Jimenez-Diaz M 2011 Modelling of microwave induced plasmas PhD Thesis Eindhoven University of Technology
25. Tatarova E and Zamfirov D 1995 A radially resolved experimental investigation of the electron energy distribution function in a microwave discharge sustained by propagating surface waves J. Phys. D: Appl. Phys. 28 1354-61
26. Dias F M, Tatarova E and Ferreira C M 1998 Spatially resolved experimental investigation of a surface wave sustained discharge in nitrogen J. Appl. Phys. 83 4602
27. van der Mullen J and Jonkers J 1999 Non-equilibrium effects induced by mobilities along steep gradients Ann. New York Acad. Sci. 891 273-84
28. van Gessel A F H, Carbone E A D, Bruggeman P J and van der Mullen J J A M 2012 Laser scattering on an atmospheric pressure plasma jet: disentangling Rayleigh, Raman and Thomson scattering Plasma Sources Sci. Technol. 21 015003
29. Iordanova E, de Vries N, Guillemier M and van der Mullen J J A M 2008 Absolute measurements of the continuum radiation to determine the electron density in a microwave-induced argon plasma J. Phys. D: Appl. Phys. 41 015208
30. Iordanova E I 2010 Polydiagnostic validation of spectroscopic methods PhD Thesis Eindhoven University of Technology
31. Carbone E A D, Palomares J M, Hbner S, Iordanova E and van der Mullen J J A M 2012 Revision of the criterion to avoid electron heating during laser aided plasma diagnostics (LAPD) J. Instrum. 7 C01016
32. Van de Sande M J and Van der Mullen J J A M 2002 Thomson scattering on a low-pressure, inductively-coupled gas discharge lamp J. Phys. D: Appl. Phys. 35 1381-91
33. van de Sande M J 2002 Laser scattering on low temperature plasmas: High resolution and straylight rejection PhD Thesis Eindhoven University of Technology
34. Aliev Y M, Schlüter H and Shivarova A 1999 Guided-Wave-Produced Plasmas (Berlin: Springer)
35. Jonkers J, van de Sande M, Sola A, Gamero A, Rodero A and van der Mullen J 2003 The role of molecular rare gas ions in plasmas operated at atmospheric pressure Plasma Sources Sci. Technol. 12 464-74
36. van der Mullen J J A M, van de Sande M J, de Vries N, Broks B, Iordanova E, Gamero A, Torres J and Sola A 2007 Single-shot thomson scattering on argon plasmas created by the microwave plasma torch; evidence for a new plasma class Spectrochim. Acta B 62 1135-46
37. Chantry P J 1987 A simple formula for diffusion calculations involving wall reflection and low density J. Appl. Phys. 62 1141-8
38. Mitchner M and Kruger C H 1973 Partially Ionized Gases (New York: Wiley)
39. Phelps A V 1994 The application of scattering cross sections to ion flux models in discharge sheaths J. Appl. Phys. 76 747
40. Hübner S, Palomares J M, Carbone E A D and van der Mullen J J A M 2012 A power pulsed low-pressure argon microwave plasma investigated by Thomson scattering: evidence for molecular assisted recombination J. Phys. D: Appl. Phys. 45 055203
41. + at temperatures near 1 K J. Chem. Phys. 96 326-31
42. Lukác P, Mikus O, Morva I, Zábudlá Z, Trnovec J and Morvová M 2011 Electron temperature dependence of the dissociative recombination coefficient of molecular argon ions with electrons Contrib. Plasma Phys. 51 672-82
43. Granier A, Gousset G, Leprince P and Marec J 1987 Argon surface wave discharges at medium pressure. Experiments and discussion on the energy balance Rev. Phys. Appl. 22 999-1006
44. Iordanova E, Hübner S, Carbone E A D, Palomares J M and van der Mullen J J A M 2012 Central axial profiles of main gas density and temperature determined with Rayleigh scattering J. Instrum. 7 C02032
45. Hübner S, Iordanova E, Palomares J M, Carbone E A D and van der Mullen J J A M 2012 Rayleigh scattering on a microwave surfatron plasma to obtain axial profiles of the atom density and temperature Eur. Phys. J. Appl. Phys. 58 20802