Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode

Microsystem Technologies

Volumn 18, Issue 7-8, 2012, Pages 997-1001

  Ruiz, V ^a   Hernando Garcia J ^a   Ababneh, A ^b   Seidel, H ^c   Schmid, U ^d   Sanchez Rojas J L ^a  

^a UNIVERSITY OF CASTILLA LA MANCHA   (Spain)

^b YARMOUK UNIVERSITY   (Jordan)

^c SAARLAND UNIVERSITY   (Germany)

^d VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

DETECTION TECHNIQUE; ELECTRICAL ACTUATION; IMPEDANCE ANALYZER; MEASUREMENT DATA; MICRO-CANTILEVERS; MODAL VIBRATIONS; OPTICAL TECHNIQUE; QUALITY FACTORS;

ALUMINUM NITRIDE; NATURAL FREQUENCIES; OPTICAL ENGINEERING;

COMPOSITE MICROMECHANICS;

EID: 84864601872     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-012-1428-x     Document Type: Conference Paper

References (10)

1. ADINA R&D (2010) ADINA System Online Manuals. http://www.adina.com
2. Beardslee LA, Demirci KS, Luzinova Y, Mizaikoff B, Heinrich SM, Josse F, Brand O (2010) Liquid-phase chemical sensing using lateral mode resonant cantilevers. Anal Chem 82:7542-7549
3. Dufour I, Heinrich SM, Josse F (2007) Theoretical analysis of strongaxis bending mode vibrations for resonant microcantilever (bio)chemical sensors in gas or liquid phase. J Microelectromech Syst 16:6
4. Hernando J, Sánchez-Rojas JL, Ababneh A, Seidel H, Söekmen Ü, Peiner E, Schmid U (2009) Characterization and simulation of high-quality AlN-actuated resonant suspended beams. Proc SPIE 7362:73620K
5. Leighton GJT, Kirby PB, Fox CHJ (2007) In-plane excitation of thin silicon cantilevers using piezoelectric thin films. Appl Phys Lett 91:183510
6. Leissa AW (1969) Vibration of plates. NASA SP 160:42
7. Manzaneque T, Hernando J, Rodríguez-Aragón L, Ababnech A, Seidel H, Schmid U, Sánchez-Rojas JL (2010) Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid. Microsyst Technol 16. Number 5:837-845
8. Ruiz V, Hernando-García J, Ababneh A, Seidel H, Schmid U, Gimzewski JK, Sánchez Rojas JL (2011) Characterization of the first in-plane mode of AlN-actuated microcantilevers. Proc SPIE 8066:80661G
9. Sader JE (2007) Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope: arbitrary mode order. J Appl Phys 101:11
10. Sánchez-Rojas J, Hernando J, Donoso A, Bellido J, Manzaneque T, Ababneh A, Seidel H, Schmid U (2010) Modal optimization and filtering in piezoelectric microplate resonators. J Micromech Microeng 20:055027