In-plane excitation of thin silicon cantilevers using piezoelectric thin films

Applied Physics Letters

Volumn 91, Issue 18, 2007, Pages

  Leighton, Glenn J T ^a   Kirby, Paul B ^a   Fox, Colin H J ^b  

^a CRANFIELD UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF NOTTINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; LEAD COMPOUNDS; PIEZOELECTRIC DEVICES; RESONATORS; THIN FILMS;

FABRICATED TEST CANTILEVERS; LEAD ZIRCONATE TITANATE; PIEZOELECTRIC THIN FILMS; THIN SILICON CANTILEVERS;

EXCITED STATES;

EID: 35648983960     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2805070     Document Type: Article

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