Cleaning of structured templates from nanoparticle accumulation using silicone

Microsystem Technologies

Volumn 18, Issue 7-8, 2012, Pages 835-842

  Merzsch, S ^a   Wasisto, H S ^a   Waag, A ^a   Kirsch, I ^b   Uhde, E ^b   Salthammer, T ^b   Peiner, E ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Wilhelm Klauditz Institut (WKI)   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COST-EFFICIENT; GOLD SURFACES; OXYGEN PLASMAS; PATTERNED SURFACE;

CONTACT ANGLE; MICROCHANNELS; NANOPARTICLES; SILICON OXIDES; SILICON WAFERS; SURFACE CLEANING;

SILICONES;

EID: 84864595029     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1379-7     Document Type: Conference Paper

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