Formation of femtosecond laser induced surface structures on silicon: Insights from numerical modeling and single pulse experiments

Applied Surface Science

Volumn 258, Issue 23, 2012, Pages 9487-9490

  Derrien, T J Y ^a   Torres, R ^a   Sarnet, T ^a   Sentis, M ^a   Itina, T E ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b UNIVERSITÉ JEAN MONNET   (France)

Author keywords

Black Silicon; Femtosecond laser; LIPSS; Ripples; Surface plasmon polariton

Indexed keywords

ELECTROMAGNETIC WAVE POLARIZATION; NUMERICAL MODELS; PHASE MATCHING; PHONONS; PHOTONS; SILICON; SURFACE PLASMON RESONANCE; SURFACE PLASMONS; SURFACE STRUCTURE;

BLACK SILICON; LASER-INDUCED PERIODIC SURFACE STRUCTURES; LIPSS; MULTIPLE IRRADIATION; RIPPLE FORMATION; RIPPLES; SILICON TARGETS; SURFACE PLASMON POLARITONS;

FEMTOSECOND LASERS;

EID: 84864445500     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.10.084     Document Type: Conference Paper

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