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Volumn 36, Issue 4, 2012, Pages 546-553

Application of atmospheric plasma jet machining (PJM) for effective surface figuring of SiC

Author keywords

Asphere; Plasma jet machining; Silicon carbide; Surface figuring; Ultra precision machining

Indexed keywords

ASPHERES; ASTRONOMICAL INSTRUMENT; ATMOSPHERIC PLASMAS; COMPLEX SURFACE; CONTACT LESS; FINISHING TECHNIQUES; FREEFORMS; JET INTERACTIONS; JET MACHINING; MECHANICAL COMPONENTS; SPACE-BASED; SURFACE FIGURING; ULTRAPRECISION MACHINING;

EID: 84864278401     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2012.04.001     Document Type: Article
Times cited : (38)

References (16)
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    • J.S. Johnson, K. Grobsky, and D.J. Bray Rapid fabrication of lightweight silicon carbide mirrors Proceedings of the SPIE 4771 2002 243
    • (2002) Proceedings of the SPIE , vol.4771 , pp. 243
    • Johnson, J.S.1    Grobsky, K.2    Bray, D.J.3
  • 3
    • 84864285443 scopus 로고    scopus 로고
    • Precision optics manufacturing using magnetorheological finishing (MRF)
    • 10.1117/12.360131
    • D. Golini Precision optics manufacturing using magnetorheological finishing (MRF) Proceedings of the SPIE 373 1999 9 10.1117/12.360131
    • (1999) Proceedings of the SPIE , vol.373 , pp. 9
    • Golini, D.1
  • 9
    • 56249122617 scopus 로고    scopus 로고
    • Reactive atom plasma (RAP) processing of mirrors for astronomy
    • 10.1117/12.786991
    • P.K. Subrahmanyan, and G. Gardopée Reactive atom plasma (RAP) processing of mirrors for astronomy Proceedings of the SPIE 701 2008 8 10.1117/12.786991
    • (2008) Proceedings of the SPIE , vol.701 , pp. 8
    • Subrahmanyan, P.K.1    Gardopée, G.2
  • 12
    • 0040511221 scopus 로고    scopus 로고
    • A review of SiC reactive ion etching in fluorinated plasmas
    • P.H. Yih, V. Saxena, and A.J. Steckl A review of SiC reactive ion etching in fluorinated plasmas Physics Status Solidi (B) 202 1997 605
    • (1997) Physics Status Solidi (B) , vol.202 , pp. 605
    • Yih, P.H.1    Saxena, V.2    Steckl, A.J.3
  • 13
    • 84938089681 scopus 로고    scopus 로고
    • Ion beam figuring of strongly curved surfaces with a (x, y, z) linear three-axes system
    • Optical Society of America Washington, DC 978-1-55752-861-2 [Paper JWD6]
    • T. Hänsel, A. Nickel, and A. Schindler Ion beam figuring of strongly curved surfaces with a (x, y, z) linear three-axes system Optical fabrication and testing, OSA technical digest on CD-ROM 2008 Optical Society of America Washington, DC 978-1-55752-861-2 [Paper JWD6]
    • (2008) Optical Fabrication and Testing, OSA Technical Digest on CD-ROM
    • Hänsel, T.1    Nickel, A.2    Schindler, A.3
  • 15
    • 84864280287 scopus 로고    scopus 로고
    • [25.08.2011]
    • http://gaia.esa.int [25.08.2011].
  • 16
    • 84864282313 scopus 로고    scopus 로고
    • Corrective polishing of strongly curved aspheric silicon carbide mirrors
    • G.P.H. Gubbels Corrective polishing of strongly curved aspheric silicon carbide mirrors SPIE Optifab Rochester TD06-17 2009
    • (2009) SPIE Optifab Rochester TD06-17
    • Gubbels, G.P.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.