Relation between electrical properties of aerosol-deposited BaTiO3 thin films and their mechanical hardness measured by nano-indentation

Nanoscale Research Letters

Volumn 7, Issue , 2012, Pages 1-16

  Kim, Hong Ki ^a   Oh, Jong Min ^a   Kim, Soo In ^b   Kim, Hyung Jun ^a   Lee, Chang Woo ^b   Nam, Song Min ^a  

^a Kwangwoon University   (South Korea)

^b Kookmin University   (South Korea)

Author keywords

Aerosol deposition; BaTiO3; Leakage current; Nano indentation; Thin film

Indexed keywords

AEROSOL DEPOSITION; BATIO; CU SUBSTRATE; DEPOSITION MECHANISM; DIELECTRIC BEHAVIOR; EMBEDDED DECOUPLING; HIGH-CAPACITANCE DENSITY; MACROSCOPIC DEFECTS; MINIMUM THICKNESS; ROOM TEMPERATURE; ROUGH INTERFACES; THIN-FILM DEPOSITIONS;

BARIUM COMPOUNDS; COPPER; DEPOSITION; DIELECTRIC PROPERTIES; HARDNESS; INTERFACES (MATERIALS); RESPIRATORY MECHANICS; THIN FILMS; VAPOR DEPOSITION;

LEAKAGE CURRENTS;

EID: 84864010691     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-7-2     Document Type: Article

References (22)

1. Shahparnia S, Ramahi OM: Electromagnetic interference (EMI) reduction from printed circuit boards (PCB) using electromagnetic bandgap structures. IEEE Trans Electromagn Compat 2004, 46(4):580-587.
2. Balaraman D, Choi J, Patel V, Raj PM, Abothu IR, Bhattacharya S, Wan L, Swaminathan M, Tummala R: Simultaneous switching noise suppression using hydrothermal barium titanate thin film capacitors. Electronic Components and Technology Conference 2004, 4:282-288.
3. Ryu JH, Kim KY, Choi JJ, Hahn BD, Yoon WH, Park DS, Park C: High dielectric properties of Bi1.5Zn1.0Nb1.5O7 thin films fabricated at room temperature. J Am Ceram Soc 2008, 91(10):3399-3401.
4. Tsurumi T, Nam SM, Mori N, Kakemoto H, Wada S, Akedo J: Room-temperature preparation of Al2O3 thick films by aerosol deposition method for integrated RF modules. J Kor Ceram Soc 2003, 40(8):715-719.
5. Nam SM, Mori N, Kakemoto H, Wada S, Akedo J, Tsurumi T: Alumina thick films as integral substrates using aerosol deposition method. Jpn J Appl Phys 2004, 43(8A):5414-5418.
6. Ulrich RK, Schaper LW: Integrated Passive Component Technology. Hoboken: Wiley-IEEE Press; 2003.
7. Lahti M, Kautio K, Juntunen E, J Petäjä, Karioja P: Advanced heat management methods in LTCC technology. Electro Magnetic Remote Sensing Defence Technology Centre Technical Conference 2005, 2:A25.
8. Abdullah MJ, Das-Gupta DK: Electrical properties of ceramic/polymer composites. IEEE Trans Elec Ins 1990, 25(3):605.
9. Akedo J, Lebedev M, Iwata A, Ogiso H, Nakano S: Aerosol deposition method (ADM) for nano-crystal ceramics coating without firing. Mat Res Soc Symp Proc 2003, 778:289-299.
10. International Technology Roadmap for Semiconductors [http://public.itrs.net]
11. Oh J, Kim NH, Choi SC, Nam SM: Thickness dependence of dielectric properties in BaTiO3 films fabricated by aerosol deposition method. Mat Sci Eng B 2009, 161:80-84.
12. Oh JM, Nam SM: Causes of high leakage currents in thin BaTiO3 films prepared by aerosol deposition method. J Kor Ceram Soc 2010, 56(1):1-4.
13. Oh JM, Kim HJ, Nam SM: Characterization of leakage current mechanisms for aerosol-deposited BaTiO3 thin films at room temperature. J Kor Ceram Soc 2010, 57(4):1096-1101.
14. Oh JM, Nam SM: Role of surface hardness of substrates in growing BaTiO3 thin films by aerosol deposition method. Jpn J Appl Phys 2009, 48:09KA07-9KA11.
15. Akedo J: Aerosol deposition of ceramic thick films at room temperature: densification mechanism of ceramic layers. J Am Ceram Soc 2006, 89(6):1834.
16. Kim SI, Lee CW: Physical properties and collapse force of according to the z-position of poly-Si pattern using nano-tribology. J Nanosci Nanotechnol 2011, 11(2):1401-1404.
17. Kim SI, Lee CW: Physical properties of a HDI-PR after dipping it in a plasma-induced liquid-vapor-activated (PLVA) PR stripper as measured by using nano-indentation. J Kor Phys Soc 2009, 55(3):995-998.
18. Kim SI, Oh HW, Huh JW, Ju BK, Lee CW: Surface potential behaviors of UV treated of Ag anode for high-performance T-OLED by nanotribology. Thin Solid Films 2011, 519:6872-6875.
19. Zhang H, Tang J, Zhang L, An B, Qin L: Atomic force microscopy measurement of the Young's modulus and hardness of single LaB6 nanowires. Appl Phys Lett 2008, 92:173121.
20. Chen YQ, Zheng XJ, Mao SX, Li W: Nanoscale mechanical behavior of vanadium doped ZnO piezoelectric nanofiber by nanoindentation technique. Appl Phys Lett 2010, 107:094302.
21. Akedo J: Room temperature impact consolidation (RTIC) of fine ceramic powder by aerosol deposition method and applications to microdevices. J Thermal Spray Tech 2007, 17(2):181.
22. Lee DW, Kim HJ, Kim YH, Yun YH, Nam SM: Growth process of α-Al2O3 ceramic films on metal substrates fabrication at room temperature by aerosol deposition. J Am Ceram Soc 2011, 94(9):3131-3138.