Physical properties and collapse force of according to the z-position of poly-Si pattern using nano-tribology

Journal of Nanoscience and Nanotechnology

Volumn 11, Issue 2, 2011, Pages 1401-1404

  Kim, Soo In ^a   Lee, Chang Woo ^a  

^a Kookmin University   (South Korea)

Author keywords

Collapse force; Elastic modulus; Hardness; Nano pattern; Nano tribology

Indexed keywords

COLLAPSE FORCE; FINE PATTERN; HORIZONTAL FORCES; NANO-PATTERN; NANO-SCRATCH; NEGATIVE EXPONENTIAL;

ELASTIC MODULI; HARDNESS; NANOTRIBOLOGY;

SILICON;

EID: 84863060645     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2011.3392     Document Type: Conference Paper

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