Effect of multiple scattering on high-resolution Rutherford backscattering spectroscopy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 285, Issue , 2012, Pages 1-5

  Sasakawa, Kaoru ^a,b   Nakajima, Kaoru ^b   Suzuki, Motofumi ^b   Kimura, Kenji ^b  

^a KOBELCO RESEARCH INSTITUTE INC   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Hafnium oxide; High resolution Rutherford backscattering spectrometry; Multiple scattering

Indexed keywords

ANALYTICAL FORMULAS; EXIT ANGLES; HIGH RESOLUTION; HIGH-RESOLUTION RUTHERFORD BACKSCATTERING SPECTROMETRY; LOW ENERGIES; MONTE CARLO SIMULATION; ULTRA-THIN;

HAFNIUM; HAFNIUM OXIDES; MONTE CARLO METHODS; ULTRATHIN FILMS;

MULTIPLE SCATTERING;

EID: 84863653211     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2012.05.002     Document Type: Article

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