Athermal arrayed waveguide gratings in silicon-oninsulator by overlaying a polymer cladding on narrowed arrayed waveguides

Applied Optics

Volumn 51, Issue 9, 2012, Pages 1251-1256

  Wang, Linghua ^a,b   Bogaerts, Wim ^a   Dumon, Pieter ^a   Selvaraja, Shankar Kumar ^a   Teng, Jie ^b   Pathak, Shibnath ^a   Han, Xiuyou ^b   Wang, Jinyan ^b   Jian, Xigao ^b   Zhao, Mingshan ^b   Baets, Roel ^a   Morthier, Geert ^a  

^a GHENT UNIVERSITY   (Belgium)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYED WAVEGUIDE GRATINGS; CROSSTALK; SILICON ON INSULATOR TECHNOLOGY; TEMPERATURE DISTRIBUTION; WAVEFORM ANALYSIS;

ARRAYED WAVEGUIDES; CENTRAL CHANNELS; POLYMER LAYERS; SILICON-ON- INSULATORS (SOI); SILICON-ON-INSULATORS; TEMPERATURE DEPENDENCE;

WAVEGUIDES;

EID: 84863345513     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.51.001251     Document Type: Article

References (25)

1. W. Bogaerts, P. Dumon, D. Van Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonic wires," IEEE J. Sel. Top. Quantum Electron. 12, 1394-1401 (2006). (Pubitemid 44956108)
2. P. Dumon,W. Bogaerts, D. Van Thourhout, D. Taillaert, and R. Baets, "Compact wavelength router based on a silicon-oninsulator arrayed waveguide grating pigtailed to a fiber array," Opt. Express 14, 664-669 (2006). (Pubitemid 43133616)
3. W. Bogaerts, S. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, "Silicon-on-insulator spectral filters fabricated with CMOS technology," IEEE J. Sel. Top. Quantum Electron. 16, 33-44 (2010).
4. J. Hasegawa, "Low loss (∼1.4 dB) 200 GHz-16ch athermal AWG compact module for metro/access network," in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2005), paper OTuD5.
5. S. Kamei, "Recent progress on athermal AWG wavelength multiplexer," in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper OWO1.
6. S. Kamei, T. Shibata, and Y. Inoue, "Compensation for second-order temperature dependence in athermal arrayedwaveguide grating realizing wide temperature range operation," Photon. Technol. Lett. 21, 1695-1697 (2009).
7. K. Maru and Y. Abe, "Low-loss, flat-passband and athermal arrayed-waveguide grating multi/demultiplexer," Opt. Express 15, 18351-18356 (2007).
8. K. Eun-Seok, K. Woo-Soo, K. Duk-Jun, and B. Byeong-Soo, "Reducing the thermal dependence of silica-based arrayedwaveguide grating using inorganic-organic hybrid materials," IEEE Photon. Technol. Lett. 16, 2625-2627 (2004).
9. H. Tanobe, Y. Kondo, Y. Kadota, K. Okamoto, and Y. Yoshikuni, "Temperature insensitive arrayed waveguide gratings on InP substrates," IEEE Photon. Technol. Lett. 10, 235-237 (1998). (Pubitemid 128566917)
10. Y. Kokubun, S. Yoneda, and S. Matsuura, "Temperatureindependent optical filter at 1.55 mm wavelength using a silica-based athermal waveguide," Electron. Lett. 34, 367-369 (1998). (Pubitemid 128561564)
11. J.-M. Lee, D.-J. Kim, H. Ahn, S.-H. Park, and G. Kim, "Temperature dependence of silicon nanophotonic ring resonator with a polymeric overlayer," J. Lightwave Technol. 25, 2236-2243 (2007). (Pubitemid 47307986)
12. J.-M. Lee, D.-J. Kim, G.-H. Kim, O.-K. Kwon, K.-J. Kim, and G. Kim, "Controlling temperature dependence of silicon waveguide using slot structure," Opt. Express 16, 1645-1652 (2008). (Pubitemid 351246295)
13. J. Teng, P. Dumon,W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, "Athermal silicon-oninsulator ring resonators by overlaying a polymer cladding on narrowed waveguides," Opt. Express 17, 14627-14633 (2009).
14. L. Zhou, K. Okamoto, and S. J. B. Yoo, "Athermalizing and trimming of slotted silicon microring resonators with UVsensitive PMMA upper-cladding," Photon. Technol. Lett. 21, 1175-1177 (2009).
15. X.Wang, S. Xiao,W. Zheng, F.Wang, Y. Li, Y. Hao, X. Jiang, M. Wang, and J. Yang, "Athermal silicon arrayed waveguide grating with polymer-filled slot structure," Opt. Commun. 282, 2841-2844 (2009).
16. H. Huang, S.-T. Ho, D. Huang, Y. Tu, and W. Liu, "Design of temperature-independent arrayed waveguide gratings based on the combination of multiple types of waveguide," Appl. Opt. 49, 3025-3034 (2010).
17. M. K. Smit and C. van Dam, "PHASAR-based WDM-devices: principles, design and applications, "IEEE J. Sel. Top. Quantum Electron. 2, 236-250 (1996). (Pubitemid 126556106)
18. Y. Kokubun, S. Yoneda, and H. Tanaka, "Temperatureindependent narrowband optical filter at 1.31 μm wavelength by an athermal waveguide," Electron. Lett. 32, 1998-2000 (1996). (Pubitemid 126606058)
19. H. B. Zhang, J. Wang, L. Li, Y. Song, M. Zhao, X. Jian, and J. Wouters, "Synthesis of liquid polysilisiquioxane resins and properties of cured films," Thin Solid Films 517, 857-862 (2008).
20. S. Selvaraja,W. Bogaerts, and D. Van Thourhout, "Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement," Opt. Commun. 284, 2141-2144 (2011).
21. P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, and R. Baets, "Wavelengthselective components in SOI photonic wires fabricated with deep UV lithography," in Proceedings of the First IEEE International Conference on Group IV Photonics (IEEE, 2004), pp. 28-30. (Pubitemid 40681566)
22. S. Selvaraja, P. Jaenen, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, "Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193 nm optical lithography," J. Lightwave Technol. 27, 4076-4083 (2009).
23. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, "High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform," Opt. Express 18, 18278-18283 (2010).
24. P. Dumon,W. Bogaerts, D. Van Thourhout, G. Morthier, and R. Baets, "Compact arrayed waveguide grating devices in siliconon-insulator," Proceedings of the IEEE/LEOS Symposium Benelux Chapter (IEEE, 2005), pp. 105-108.
25. J. Schrauwen, D. Van Thourhout, and R. Baets, "Trimming of silicon ring resonator by electron beam induced compaction and strain," Opt. Express 16, 3738-3743 (2008). (Pubitemid 351434346)