Design of a thermoelectric layer for a micro power generator

International Journal of Precision Engineering and Manufacturing

Volumn 13, Issue 2, 2012, Pages 261-267

  Kim, Hyunse ^a   Lee, Yanglae ^a   Lee, Kong Hoon ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Micro thermoelectric generator; Poly Si film; Taguchi method

Indexed keywords

EID: 84863144323     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-012-0032-4     Document Type: Article

References (19)

1. Peace, G. S., Taguchi Methods, Addison-Wesley Publishing Company, 1995.
2. Hwang, Y. K., Lee, C. M. and Park, S. H., Evaluation of machinability according to the changes in machine tools and cooling lubrication environments and optimization of cutting conditions using Taguchi method, Int. J. Precis. Eng. Manuf., Vol. 10, No. 3, pp. 65-73, 2009.
3. Ha, J., Kung, Y., Hu, S. and Fung, R., Optimal design of a micro-positioning Scott-Russell mechanism by Taguchi method, Sens. Actuators A, Vol. 125, No. 2, pp. 565-572, 2006.
4. Yoon, H.-S., Wu, R., Lee, T.-M. and Ahn, S.-H., Geometric optimization of micro drills using Taguchi methods and response surface methodology, Int. J. Precis. Eng. Manuf., Vol. 12, No. 5, pp. 871-875, 2011.
5. Chen, R. S., Kung, C. and Lee, G.-B., Analysis of the optimal dimension on the electrothermal microactuator, J. Micromech. Microeng., Vol. 12, No. 3, pp. 291-296, 2002.
6. Zhang, J., Tan, K. L., Hong, G. D., Yang, L. J. and Gong, H. Q., Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS, J. Micromech. Microeng., Vol. 11, No. 1, pp. 20-26, 2001.
7. Kim, Y. S., Kim, P. K., Lee, J. H. and Seok, J. W., Characterization and parameter optimization of a microcellular polypropylene electret under an external inertial load, Int. J. Precis. Eng. Manuf., Vol. 10, No. 5, pp. 97-106, 2009.
8. Strasser, M., Aigner, R., Lauterbach, C., Sturm, T. F., Franosch, M. and Wachutka, G., Micromachined CMOS thermoelectric generators as on-chip power supply, Sens. Actuators A, Vol. 114, No. 2-3, pp. 362-370, 2004.
9. Rowe, D. M., Morgan, D. V. and Kiely, J. H., Miniature low- power/high-voltage thermoelectric generator, Electronics Letters, Vol. 25, No. 2, pp. 166-168, 1989.
10. Kiely, J. J., Morgan, D. V. and Rowe, D. M., Low cost miniature thermoelectric generator, Electronics Letters, Vol. 27, No. 25, pp. 2332-2334, 1991.
11. Strasser, M., Aigner, R., Franosch, M. and Wachutka, G., Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining, Sens. Actuators A, Vol. 97-98, pp. 535-542, 2002.
12. Posthill, J., Reddy, A., Siivola, E., Krueger, G., Mantini, M., Thomas, P., Venkatasubramanian, R., Ochoa, F. and Ronney, P., Portable power sources using combustion of butane and thermoelectrics, Proc. of 24th Int. Conf. on Thermoelectrics, pp. 532-535, 2005.
13. Glatz, W., Schwyter, E., Durrer, L. and Hierold, C., Bi2Te3- based flexible micro thermoelectric generator with optimized design, J. of Microelectromech. Syst., Vol. 18, No. 7, pp. 763-772, 2009.
14. th Int. Conf. on Thermoelectrics, pp. 465-472, 1999.
15. Ghafouri, N., Kim, H., Atashbar, M. Z. and Najafi, K., A micro thermoelectric energy scavenger for a hybrid insect, Proc. Of Sensors Conf., pp. 1249-1252, 2008.
16. Koukharenko, E., Li, X., Nandhakumar, I., Schiedt, B., Trautmann, C., Speed, J., Tudor, M. J., Beeby, S. P. and White, N. M., Development of nanostructures for thermoelectric microgenerators using ion-track lithography, Electronics Letters, Vol. 44, No. 7, pp. 500-501, 2008.
17. Rowe, D. M., Thermoelectrics handbook, CRC Press, pp. 1-5, 2006.
18. Jelenkovic, E. V. and Tong, K. Y., Effect of SiGe thickness on crystallisation and electrical properties of sputtered silicon film in Si/SiGe/insulator structure, Applied Surface Science, Vol. 135, No. 1-4, pp. 143-149, 1998.
19. Scarpa, A., Riess, P., Ghibaudo, G., Paccagnella, A., Pananakakis, G., Ceschia, M. and Ghidini, G., Electrically and radiation induced leakage currents in thin oxides, Microelectronics Reliability, Vol. 40, No. 1, pp. 57-67, 2000.