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Volumn 33, Issue 1, 2008, Pages 470-475

Significance of electrode-spacing in hydrogen detection for tin oxide-based MEMS sensor

Author keywords

Hydrogen; MEMS; Nano Macro integration; Nano Micro integration; Room temperature; Sensor; Sol gel; Thin film

Indexed keywords

ELECTROCHEMICAL ELECTRODES; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; HYDROGEN; KINETICS; NANOCRYSTALLINE MATERIALS; SENSORS; SOL-GEL PROCESS; THIN FILMS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 38349137778     PISSN: 03603199     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijhydene.2007.07.043     Document Type: Article
Times cited : (31)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.