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Volumn 33, Issue 1, 2008, Pages 470-475
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Significance of electrode-spacing in hydrogen detection for tin oxide-based MEMS sensor
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Author keywords
Hydrogen; MEMS; Nano Macro integration; Nano Micro integration; Room temperature; Sensor; Sol gel; Thin film
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Indexed keywords
ELECTROCHEMICAL ELECTRODES;
HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;
HYDROGEN;
KINETICS;
NANOCRYSTALLINE MATERIALS;
SENSORS;
SOL-GEL PROCESS;
THIN FILMS;
X RAY DIFFRACTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
INTEGRATED SENSOR-DEVICES;
NANO-MACRO INTEGRATION;
NANO-MICRO INTEGRATION;
ROOM TEMPERATURE;
MEMS;
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EID: 38349137778
PISSN: 03603199
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ijhydene.2007.07.043 Document Type: Article |
Times cited : (31)
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References (14)
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