Integration of nanoelectromechanical (NEM) relays with silicon CMOS with functional CMOS-NEM circuit

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2011, Pages

  Chong, Soogine ^a   Lee, Byoungil ^a   Parizi, Kokab B ^a   Provine, J ^a   Mitra, Subhasish ^a   Howe, Roger T ^a   Wong, H S Philip ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS COMPATIBLE; CMOS INVERTERS; HYBRID CIRCUIT; NANO-ELECTROMECHANICAL; ON CHIPS; RELAY CIRCUIT; SILICON CMOS;

ELECTROSTATIC ACTUATORS; PLATINUM;

ELECTRON DEVICES;

EID: 84863012171     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2011.6131645     Document Type: Conference Paper

References (10)

1. F. Chen et al., "Integrated circuit design with NEM relays," ICCAD, 2008, pp. 750-757.
2. F. Chen et al., "Demonstration of Integrated Micro-Electro- Mechanical Switch Circuits for VLSI Applications," ISSCC, 2010,pp. 150-151.
3. C. Chen et al., "FPGAs using nanoelectromechanical relays," FPGA, 2010, pp. 273-282.
4. S. Chong et al., "Nanoelectromechanical (NEM) Relays Integrated with CMOS SRAM for Improved Stability and Low Leakage," ICCAD, 2009, pp. 478-484.
5. H.F. Dadgour and K. Banerjee, "Design and Analysis of Hybrid NEMS-CMOS Circuits for Ultra Low-Power Applications," DAC, 2007, pp. 306-311.
6. S. Chong et al., unpublished.
7. R. Gaddi et al., "MEMS technology integrated in the CMOS back end," Microelectronics Reliability, vol. 50, pp. 1593-1598, Sep. - Nov. 2010.
8. K.A. Honer and G.T.A. Kovacs, "Integration of sputtered silicon microstructures with pre-fabricated CMOS circuitry," Sensors and Acutators A, vol. 91, pp. 386-397, July 2001.
9. A. E. Franke, J. M. Heck, T.-J. King, and R. T. Howe, "Polycrystalline silicon-germanium films for integrated Microsystems," Journal of Microelectromechanical Systems, vol. 12, no. 2, pp. 160-171, Apr. 2003.
10. D. Saias et al., "An Above IC MEMS RF Switch," Journal of Solid-State Circuits, vol. 38, no. 12, pp. 2318-2324, Dec. 2003.