SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 30, Issue 1, 2012, Pages

Extraction of a low-current discharge from a microplasma for nanoscale patterning applications at atmospheric pressure

(4) Lee, Seung Whan a Zamani, Hamidreza a Feng, Philip X L a Mohan Sankaran, R a

a Case Western Reserve University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTROLYTIC REDUCTION; LITHOGRAPHY; METAL IONS; METAMATERIALS; PLASMA DEVICES; X RAY PHOTOELECTRON SPECTROSCOPY;

AMBIENT CONDITIONS; ELECTROCHEMICAL REDUCTIONS; HIGH STABILITY; LOW CURRENTS; LOW-CURRENT DISCHARGES; MASKING TECHNIQUE; METAL PRECURSOR; MICRO-PLASMAS; NANO-SCALE PATTERNS; NANOPATTERNING; NANOSCALE PATTERNING; POSITIVE VOLTAGE; SOLID METALS; TUNABILITIES;

CURRENT VOLTAGE CHARACTERISTICS;

EID: 84863011325 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3669523 Document Type: Article

Times cited : (12)

References (27)

1
- 0000296072
- Electron Beam Lithography
- edited by P. Rai-Choudhury (SPIE, Bellingham, Washington)
- M. A. McCord and M. J. Rooks, Electron Beam Lithography., in Handbook of Microlithography, Micromachining and Microfabrication, edited by, P. Rai-Choudhury, (SPIE, Bellingham, Washington, 1997), Vol. 1.
- (1997) Handbook of Microlithography, Micromachining and Microfabrication , vol.1
- McCord, M.A.¹ Rooks, M.J.²

2
- 23144465269
- Approaching the resolution limit of nanometer-scale electron beam-induced deposition
- DOI 10.1021/nl050522i
- W. F. van Dorp, B. van Someren, C. W. Hagen, and P. Kruit, Nano Lett. 5, 1303 (2005). 10.1021/nl050522i (Pubitemid 41084407)
- (2005) Nano Letters , vol.5 , Issue.7 , pp. 1303-1307
- Van Dorp, W.F.¹ Van Someren, B.² Hagen, C.W.³ Kruit, P.⁴ Crozier, P.A.⁵

3
- 67650385749
- 10.1021/nl9012216
- E. U. Donev and J. T. Hastings, Nano Lett. 9, 2715 (2009). 10.1021/nl9012216
- (2009) Nano Lett. , vol.9 , pp. 2715
- Donev, E.U.¹ Hastings, J.T.²

4
- 58949100675
- 10.1016/j.catcom.2008.12.037
- Z. Wang, C.-J. Liu, and G. Zhang, Catal. Commun. 10, 959 (2009). 10.1016/j.catcom.2008.12.037
- (2009) Catal. Commun. , vol.10 , pp. 959
- Wang, Z.¹ Liu, C.-J.² Zhang, G.³

5
- 33846390702
- Reduction of supported noble-metal ions using glow discharge plasma
- DOI 10.1021/la061795b
- J.-J. Zou, Y.-P. Zhang, and C.-J. Liu, Langmuir 22, 11388 (2006). 10.1021/la061795b (Pubitemid 46129685)
- (2006) Langmuir , vol.22 , Issue.26 , pp. 11388-11394
- Zou, J.-J.¹ Zhang, Y.-P.² Liu, C.-J.³

6
- 79957964653
- 10.1002/adfm.201100093
- S. W. Lee, D. Liang, X. P. A Gao, and R. M. Sankaran, Adv. Funct. Mater. 21, 2155 (2011). 10.1002/adfm.201100093
- (2011) Adv. Funct. Mater. , vol.21 , pp. 2155
- Lee, S.W.¹ Liang, D.² Gao, X.P.A.³ Sankaran, R.M.⁴

7
- 61349112043
- 10.1021/jp805538j
- Z.-J. Wang, Y. Xie, and C.-J. Liu, J. Phys. Chem. C 112, 19818 (2008). 10.1021/jp805538j
- (2008) J. Phys. Chem. C , vol.112 , pp. 19818
- Wang, Z.-J.¹ Xie, Y.² Liu, C.-J.³

8
- 0142072589
- 3+ Nanoparticles Synthesized from Block Copolymer Micelles
- DOI 10.1021/ja036468u
- B. R. Cuenya, S.-H. Baeck, T. F. Jaramillo, and E. W. McFarland, J. Am. Chem. Soc. 125, 12928 (2003). 10.1021/ja036468u (Pubitemid 37280461)
- (2003) Journal of the American Chemical Society , vol.125 , Issue.42 , pp. 12928-12934
- Cuenya, B.R.¹ Baeck, S.-H.² Jaramillo, T.F.³ McFarland, E.W.⁴

9
- 0142217347
- 10.1088/0957-4484/14/10/314
- R. Glass, M. Moller, and J. P. Spatz, Nanotechnology 14, 1153 (2003). 10.1088/0957-4484/14/10/314
- (2003) Nanotechnology , vol.14 , pp. 1153
- Glass, R.¹ Moller, M.² Spatz, J.P.³

10
- 78650556682
- 10.1073/pnas.1014892107
- J. Chai, F. Huo, Z. Zheng, L. R. Giam, W. Shim, and C. A. Mirkin, Proc. Natl. Acad. Sci. U.S.A. 107, 20202 (2010). 10.1073/pnas.1014892107
- (2010) Proc. Natl. Acad. Sci. U.S.A. , vol.107 , pp. 20202
- Chai, J.¹ Huo, F.² Zheng, Z.³ Giam, L.R.⁴ Shim, W.⁵ Mirkin, C.A.⁶

11
- 79959365204
- 10.1016/j.eurpolymj.2011.04.002
- Q. Shi, N. Vitchuli, J. Nowak, J. M. Caldwell, F. Breidt, M. Bourham, X. Zhang, and M. McCord, Eur. Polym. J. 47, 1402 (2011). 10.1016/j.eurpolymj.2011. 04.002
- (2011) Eur. Polym. J. , vol.47 , pp. 1402
- Shi, Q.¹ Vitchuli, N.² Nowak, J.³ Caldwell, J.M.⁴ Breidt, F.⁵ Bourham, M.⁶ Zhang, X.⁷ McCord, M.⁸

12
- 27344454866
- Platinum nanoparticles prepared by a plasma-chemical reduction method
- DOI 10.1039/b508420b
- I. G. Koo, M. S. Lee, J. H. Shim, J. H. Ahnb, and W. M. Lee, J. Mater. Chem. 15, 4125 (2005). 10.1039/b508420b (Pubitemid 41527314)
- (2005) Journal of Materials Chemistry , vol.15 , Issue.38 , pp. 4125-4128
- Koo, I.G.¹ Lee, M.S.² Shim, J.H.³ Ahn, J.H.⁴ Lee, W.M.⁵

13
- 33846205239
- Carbon-supported platinum nanoparticles synthesized by plasma-chemical reduction method for fuel cell applications
- DOI 10.1149/1.2401032
- J. Shim, K. Y. Joung, J. H. Ahn, and W. M. Lee, J. Electrochem. Soc. 154, B165 (2007). 10.1149/1.2401032 (Pubitemid 46094480)
- (2007) Journal of the Electrochemical Society , vol.154 , Issue.2
- Shim, J.¹ Joung, K.Y.² Ahn, J.H.³ Lee, W.M.⁴

14
- 53349177349
- 10.1063/1.2988283
- C. M. Richmonds and R. M. Sankaran, Appl. Phys. Lett. 93, 131501 (2008). 10.1063/1.2988283
- (2008) Appl. Phys. Lett. , vol.93 , pp. 131501
- Richmonds, C.M.¹ Sankaran, R.M.²

15
- 79954626133
- 10.1088/0022-3727/44/17/174001
- K. Ostrikov, U. Cvelbar, and A. B. Murphy, J. Phys. D 44, 174001 (2011). 10.1088/0022-3727/44/17/174001
- (2011) J. Phys. D , vol.44 , pp. 174001
- Ostrikov, K.¹ Cvelbar, U.² Murphy, A.B.³

16
- 77956991352
- 10.1088/0022-3727/43/32/323001
- D. Mariotti and R. M. Sankaran, J. Phys. D 43, 323001 (2010). 10.1088/0022-3727/43/32/323001
- (2010) J. Phys. D , vol.43 , pp. 323001
- Mariotti, D.¹ Sankaran, R.M.²

17
- 0016027192
- 10.1109/JQE.1974.1145795
- J. R. Bayless, R. C. Knechtli, and G. N. Mercer, IEEE J. Quantum. Electron. 10, 2 (1974). 10.1109/JQE.1974.1145795
- (1974) IEEE J. Quantum. Electron. , vol.10 , pp. 2
- Bayless, J.R.¹ Knechtli, R.C.² Mercer, G.N.³

18
- 0000113460
- 10.1063/1.369505
- R. H. Stark and K. H. Schoenbach, J. Appl. Phys. 85, 2075 (1999). 10.1063/1.369505
- (1999) J. Appl. Phys. , vol.85 , pp. 2075
- Stark, R.H.¹ Schoenbach, K.H.²

19
- 33749079600
- Electron number density measurement on a DC argon plasma jet by stark broadening of Ar I spectral line
- DOI 10.1016/j.vacuum.2006.06.001, PII S0042207X06001928
- S. Yugeswaran and V. Selvarajan, Vacuum 81, 347 (2006). 10.1016/j.vacuum.2006.06.001 (Pubitemid 44466033)
- (2006) Vacuum , vol.81 , Issue.3 , pp. 347-352
- Yugeswaran, S.¹ Selvarajan, V.²

20
- 85015240338
- R. M. Sankaran and K. P. Giapis, J. Appl. Phys. 92, 5 (2002).
- (2002) J. Appl. Phys. , vol.92 , pp. 5
- Sankaran, R.M.¹ Giapis, K.P.²

21
- 0003839414
- (Springer, Berlin).
- Y. P. Raizer, Gas Discharge Physics (Springer, Berlin, 1991).
- (1991) Gas Discharge Physics
- Raizer, Y.P.¹

22
- 31144475911
- Microplasmas and applications
- DOI 10.1088/0022-3727/39/3/R01, PII S0022372706796450
- K. H. Becker, K. H. Schoenbach, and J. G. Eden, J. Phys. D. 39, R55 (2006). 10.1088/0022-3727/39/3/R01 (Pubitemid 43133822)
- (2006) Journal of Physics D: Applied Physics , vol.39 , Issue.3
- Becker, K.H.¹ Schoenbach, K.H.² Eden, J.G.³

23
- 77955656022
- 10.1016/j.apsusc.2010.04.070
- G. Guoa, W. Gana, J. Luo, F. Xiang, J. Zhang, H. Zhou, and H. Liu, Appl. Surf. Sci. 256, 6683 (2010). 10.1016/j.apsusc.2010.04.070
- (2010) Appl. Surf. Sci. , vol.256 , pp. 6683
- Guoa, G.¹ Gana, W.² Luo, J.³ Xiang, F.⁴ Zhang, J.⁵ Zhou, H.⁶ Liu, H.⁷

24
- 0003885146
- (Wiley, New York).
- M. P. Seah and D. Briggs, Practical Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy (Wiley, New York, 1992).
- (1992) Practical Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy
- Seah, M.P.¹ Briggs, D.²

25
- 67049132997
- 10.1021/jp811062m
- T. Bhuvana, C. Subramaniam, T. Pradeep, and G. U. Kulkarni, J. Phys. Chem. C 113, 17 (2009). 10.1021/jp811062m
- (2009) J. Phys. Chem. C , vol.113 , pp. 17
- Bhuvana, T.¹ Subramaniam, C.² Pradeep, T.³ Kulkarni, G.U.⁴

26
- 34250679858
- 10.1007/s11051-004-1716-1
- T. Miyama and Y. Yonezawa. J. Nanopart. Res. 6, 457 (2004). 10.1007/s11051-004-1716-1
- (2004) J. Nanopart. Res. , vol.6 , pp. 457
- Miyama, T.¹ Yonezawa, Y.²

27
- 48249102702
- 10.1088/0957-4484/19/35/355308
- R. Abargues, J. Marqués-Hueso, J. Canet-Ferrer, E. Pedrueza, J. L. Valdés, E. Jiménez and J. P. Martnez-Pastor, Nanotechnology 19, 355308 (2008). 10.1088/0957-4484/19/35/355308
- (2008) Nanotechnology , vol.19 , pp. 355308
- Abargues, R.¹ Marqués-Hueso, J.² Canet-Ferrer, J.³ Pedrueza, E.⁴ Valdés, J.L.⁵ Jiménez, E.⁶ Martnez-Pastor, J.P.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.