Highly condensed epoxy-oligosiloxane-based hybrid material for transparent low- k dielectric coatings

ACS Applied Materials and Interfaces

Volumn 1, Issue 7, 2009, Pages 1585-1590

  Yang, Seungcheol ^a   Kwak, Seung Yeon ^a   Jin, Jungho ^a   Bae, Byeong Soo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

dielectric coating; hybrid material; oligosiloxane; passivation; TFT

Indexed keywords

COATING FILMS; DIELECTRIC COATINGS; DIELECTRIC CONSTANTS; DIPHENYLSILANEDIOL; HIGH TRANSMITTANCE; HIGHER-DEGREE; HYBRIMER; LOW K DIELECTRICS; MOLECULAR SIZE; OLIGOSILOXANE; PASSIVATION LAYER; TFT; THERMAL CURING; TRIMETHOXYSILANE;

COATINGS; CONDENSATION; CONDENSATION REACTIONS; FILMS; HYBRID MATERIALS; PASSIVATION; RESINS; SOL-GELS; SOLVENTS; THIN FILM TRANSISTORS;

EPOXY RESINS;

EID: 84862833085     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am900252v     Document Type: Article

References (23)

1. Katayama, M. Thin Solid Films 1999, 341, 140-147
2. Matsumura, H. J. Appl. Phys. 1989, 66, 3612-3617
3. Krishnamoorthy, A., Spear, R., Gebrebrhan, A., Stifanos, M., Bien, H., Lowe, M., Yellowaga, D., Smith, P., O'Rourke, S., Loy, D., Dailey, J., Marrs, M. and Ageno, S. SID2008 DEGEST 2008, 140-142
4. Sivoththaman, S., Jeyakumar, R., Ren, L. and Nathan, A. J. Vac. Sci. Technol. A 2002, 20, 1149-1153
5. Chang, T.-S., Chang, T.-C., Liu, P.-T., Chang, T.-S., Tu, C.-H. and Yeh, F.-S. IEEE Electron Devices L 2006, 27, 902-904
6. Chang, T.-S., Chang, T.-C., Liu, P.-T., Tsao, S.-W. and Yeh, F.-S. Thin Solid Films 2007, 516, 374-377
7. Eo, Y. J., Kim, J. H., Ko, J. J. and Bae, B. S. J. Mater. Res. 2005, 20, 401-408
8. Kim, J. K., Kang, D. J. and Bae, B. S. Adv. Funct. Mater. 2005, 15, 1870-1876
9. Kang, D. J., Kim, W. S. and Bae, B. S. Appl. Phys. Lett. 2005, 87, 221106
10. Lee, T. H., Kim, J. H. and Bae, B. S. J. Mater. Chem. 2006, 16, 1657-1664
11. Yang, S. C., Kim, J. H., Jin, J. H. and Bae, B. S. J. Polym. Sci., Polym. Phys. 2009, 47, 756-763
12. Jermouni, T., Smaihi, M. and Hovnanian, N. J. Mater. Chem. 1995, 5, 1203-1208
13. Brunet, F. J. Non-Cryst Solids 1998, 231, 58-77
14. Hoebbel, D., Reinert, T. and Schmidt, H. J. Sol-Gel. Sci. Technol. 1996, 7, 217-224
15. Sepeur, S., Kunze, N., Werner, B. and Schmidt, H. Thin Solid Films 1999, 351, 216-219
16. Innocenzi, P., Brusatin, G., Guglielmi, M. and Bertani, R. Chem. Mater. 1999, 11, 1672-1679
17. Ou, D. L. and Seddon, A. B. J. Non-Cryst. Solids 1997, 210, 187-203
18. Shirosakia, Y., Tsurua, K., Hayakawaa, S., Osakaa, A., Lopes, M. A., Santos, J. D. and Fernandes, M. H. Biomaterials 2005, 26, 485-493
19. Roe, R. J. Methods of X-ray and Neutron Scattering in Polymer Science; Oxford University Press: New York, 2000; p 155.
20. Klauk, H., Halik, M., Zschieschang, U., Schmid, G., Radlik, W. and Weber, W. J. Appl. Phys. 2002, 92, 5259-5263
21. Smyth, C. P. Dielectric Behavior and Structure; McGraw-Hill Book Co.: New York, 1955; p 5.
22. Simpson, J. O. and St. Clair, A. K. Thin Solid Films 1997, 308-309, 480-485
23. Kim, H. J., Shao, Q. and Kim, Y.-H. Surf. Coat. Technol. 2003, 171, 39-45