Modeling and optimization of ITO/Al/ITO multilayer films characteristics using neural network and genetic algorithm

Expert Systems with Applications

Volumn 39, Issue 10, 2012, Pages 8885-8889

  Cho, Edward Namkyu ^a   Moon, Pyung ^a   Kim, Chang Eun ^a   Yun, Ilgu ^a  

^a Yonsei University   (South Korea)

Author keywords

Figure of merit; Genetic algorithm; ITO Al ITO; Multilayer films; Neural network

Indexed keywords

AL FILMS; ANNEALING TEMPERATURES; DESIGN SPACES; FIGURE OF MERITS; ITO/AL/ITO; MODELING AND OPTIMIZATION; OPTIMUM PROCESS CONDITIONS; ROOT MEAN SQUARE ERRORS; TRAINING AND TESTING;

MEAN SQUARE ERROR; METALLIC FILMS; MULTILAYER FILMS; NEURAL NETWORKS; OPACITY; SHEET RESISTANCE;

GENETIC ALGORITHMS;

EID: 84862812293     PISSN: 09574174     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.eswa.2012.02.019     Document Type: Article

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