Magnetron sputtered tungsten oxide films activated by dip-coated platinum for ppm-level hydrogen detection

Thin Solid Films

Volumn 520, Issue 9, 2012, Pages 3679-3683

  Zhang, Chao ^a   Boudiba, Abdelhamid ^a   Olivier, Marie Georges ^a,b   Snyders, Rony ^a,b   Debliquy, Marc ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b MATERIA NOVA RESEARCH CENTER   (Belgium)

Author keywords

Hydrogen sensor; Platnium; Sputtering; Tungsten oxide

Indexed keywords

CHEMICAL COMPOSITIONS; DIP COATING; HYDROGEN DETECTION; HYDROGEN SENSOR; MAGNETRON SPUTTERED TUNGSTEN; PLATNIUM; PT CLUSTERS; REACTIVE MAGNETRON SPUTTERING; REST PERIODS; SENSING APPLICATIONS; TUNGSTEN OXIDE;

HYDROGEN; OXIDE FILMS; OXIDES; PHASE STRUCTURE; PLATINUM; SCANNING ELECTRON MICROSCOPY; SPUTTERING; TUNGSTEN COMPOUNDS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

PLATINUM COMPOUNDS;

EID: 84862799812     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.12.085     Document Type: Article

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