Fabrication of amorphous silicon microgap structure for energy saving devices

Sains Malaysiana

Volumn 41, Issue 6, 2012, Pages 755-759

  Dhahi, T H S ^a   Hashim, U ^a   Ali, M E ^a   Nazwa, T ^a  

^a UNIVERSITY MALAYSIA PERLIS   (Malaysia)

Author keywords

Dielectric detection of biomolecule; Microgap electrodes; Power saving devices

Indexed keywords

AMORPHOUS MEDIUM; ELECTROCHEMICAL METHOD; ELECTRODE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR INDUSTRY; SILICON;

EID: 84862742533     PISSN: 01266039     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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