A study of surface texturing of carbon steel by photochemical machining

Journal of Materials Processing Technology

Volumn 212, Issue 10, 2012, Pages 2133-2140

  Zhang, Jinyu ^a   Meng, Yonggang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Carbon steel; Photochemical machining; Surface texturing; Topography

Indexed keywords

COATING SPEED; DEVELOPMENT TIME; DIFFERENT SIZES; ETCHING DEPTH; ETCHING TIME; EXPOSURE-TIME; HYDRODYNAMIC LUBRICATION; MASS PERCENTAGE; MICRO TEXTURE; MIXTURE SOLUTION; PHOTOCHEMICAL MACHINING; PHOTORESIST FILM; PRECISE CONTROL; PREDICTION MODEL; PROCESS PARAMETERS; STEEL SURFACE; SURFACE-TEXTURING; TEXTURED SURFACE; TRIAL-AND-ERROR APPROACH;

EXPERIMENTS; PHOTORESISTS; TOPOGRAPHY; WET ETCHING;

CARBON STEEL;

EID: 84862737857     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2012.05.018     Document Type: Article

References (23)

1. K. Abate Photochemical etching of metals Metal Finishing 97 1999 398 401
2. D.M. Allen The Principles and Practice of Photochemical Machining and Photoetching 1986 Adam Hilger, IOP Bristol
3. D.M. Allen Photochemical machining: from manufacturing's best kept secret to a $6 billion per annum, rapid manufacturing process CIRP Annals - Manufacturing Technology 53 2004 559 572 (Pubitemid 40108521)
4. V. Brizmer, Y. Kligerman, and I. Etsion A laser surface textured parallel thrust bearing Tribology Transactions 46 2003 397 403
5. H.L. Costa, and I.M. Hutchings Hydrodynamic lubrication of textured steel surfaces under reciprocating sliding conditions Tribology International 40 2007 1227 1238 (Pubitemid 46654551)
6. Z. Cui Micro-Nanofabrication Technologies and Applications 2005 Higher Education Press Beijing
7. I. Etsion State of the art in laser surface texturing Journal of Tribology - Transactions of the ASME 127 2005 248 253 (Pubitemid 40382712)
8. I. Etsion, and G. Halperin A laser surface textured hydrostatic mechanical seal Tribology Transactions 45 2002 430 434
9. A. Greco, S. Raphaelson, K. Ehmann, Q.J. Wang, and C. Lin Surface texturing of tribological interfaces using the vibromechanical texturing method Journal of Manufacturing Science and Engineering - Transactions of the ASME 131 2009 1 8
10. W.T. Harris Chemical Milling: The Technology of Cutting Materials by Etching 1976 Clarendon Press Oxford
11. Hartman, D.H.; Lebby, M.S.; 1993. Method for patterning a mold. US Patent 5348616.
12. H.K. Kuiken, and R.P. Tijburg Centrifugal etching: a promising new tool to achieve deep etching results Journal of the Electrochemical Society 130 1983 1722 1729 (Pubitemid 13587307)
13. T.S. Kustandi, J.H. Choo, H.Y. Low, and S.K. Sinha Texturing of UHMWPE surface via NIL for low friction and wear properties Journal of Physics D: Applied Physics 43 2010 1 6
14. H.J. Levinson Principles of Lithography 2001 SPIE Press Bellingham
15. T. Nanbu, N. Ren, Y. Yasuda, D. Zhu, and Q.J. Wang Micro-textures in concentrated conformal-contact lubrication: effects of texture bottom shape and surface relative motion Tribology Letters 29 2008 241 252
16. P. Pal, K. Sato, M. Shikida, and M.A. Gosálvez Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH Sensors and Actuators A: Physical 154 2009 192 203
17. U. Pettersson, and S. Jacobson Influence of surface texture on boundary lubricated sliding contacts Tribology International 36 2003 857 864
18. R. Roy, D. Allen, and O. Zamora Cost of photochemical machining Journal of Materials Processing Technology 149 2004 460 465
19. G. Ryk, Y. Kligerman, and I. Etsion Experimental investigation of laser surface texturing for reciprocating automotive components Tribology Transactions 45 2002 444 449
20. L.S. Stephens, R. Siripuram, M. Hayden, and B. Mccartt Deterministic micro asperities on bearings and seals using a modified LIGA process Journal of Engineering for Gas Turbines and Power - Transactions of the ASME 126 2004 147 154 (Pubitemid 40231397)
21. L.J. Sun, J.S. Liang, C. Liu, Y.B. Cao, L. Chen, and J.S. Liu Effects of the initial stencil width on stainless steel wet chemical etching: combined model and experimental investigations Journal of Micromechanics and Microengineering 19 2009 1 8
22. X.L. Wang, K. Adachi, K. Otsuka, and K. Kato Optimization of the surface texture for silicon carbide sliding in water Applied Surface Science 253 2006 1282 1286 (Pubitemid 44709294)
23. H.W. Yu, X.L. Wang, and F. Zhou Geometric shape effects of surface texture on the generation of hydrodynamic pressure between conformal contacting surfaces Tribology Letters 37 2010 123 130