Effects of the initial stencil width on stainless steel wet chemical etching: Combined model and experimental investigations

Journal of Micromechanics and Microengineering

Volumn 19, Issue 8, 2009, Pages

  Sun, Lingjun ^a   Liang, Junsheng ^a   Liu, Chong ^a   Cao, Yuanbao ^a   Chen, Li ^a   Liu, Junshan ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COEFFICIENT OF DETERMINATION; COMBINED MODEL; ETCHING DEPTH; ETCHING RATE; ETCHING TIME; EXPERIMENTAL INVESTIGATIONS; FITTING ACCURACY; MATHEMATICAL DERIVATION; PRACTICAL PRODUCTION; PREDICTIVE CAPABILITIES; WET-CHEMICAL ETCHING;

STAINLESS STEEL;

WET ETCHING;

EID: 70350676841     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/8/085023     Document Type: Article

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