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Journal of Physics: Conference Series

Volumn 365, Issue 1, 2012, Pages

Effect of annealing on ZnO thin films grown on quartz substrate by RF magnetron sputtering

(3) Kumar, G Anil a Reddy, M V Ramana a Reddy, Katta Narasimha b

a OSMANIA UNIVERSITY (India)

b MAHATMA GANDHI UNIVERSITY (India)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ANNEALING; CRYSTALLITE SIZE; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL PROPERTIES; OXIDE FILMS; QUARTZ; SPUTTERING; SUBSTRATES; X RAY DIFFRACTION; ZINC OXIDE;

ANNEALING TEMPERATURES; CRYSTALLINE PROPERTIES; MICROSTRUCTURAL PARAMETERS; PREFERENTIAL ORIENTATION; RF MAGNETRON SPUTTERING TECHNIQUE; RF-MAGNETRON SPUTTERING; STRUCTURAL AND OPTICAL PROPERTIES; ZINC OXIDE THIN FILMS;

THIN FILMS;

EID: 84862199728 PISSN: 17426588 EISSN: 17426596 Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/365/1/012031 Document Type: Conference Paper

Times cited : (19)

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