Design and fabrication of a micropreconcentrator focuser for sensitivity enhancement of chemical sensing systems

IEEE Sensors Journal

Volumn 12, Issue 7, 2012, Pages 2528-2534

  Dow, Ali B Alamin ^a   Lang, Walter ^b  

^a UNIVERSITY OF TORONTO   (Canada)

^b UNIVERSITY OF BREMEN   (Germany)

Author keywords

Gas monitoring microsystem; ppb; preconcentrator focuser

Indexed keywords

ANALYTES; ANODIC BONDING; CARBOXEN; CHEMICAL SENSING SYSTEMS; CLEAN AIR; DEEP REACTIVE ION ETCHING; DEVICE PERFORMANCE; ETHYLENE CONCENTRATION; ETHYLENE MONITORING; FRONT END; GAS MONITORING; GAS MONITORING SYSTEMS; HEATING PULSE; HIGH QUALITY; LOW CONCENTRATIONS; LOW SENSITIVITY; MICROHEATER; MICROPRECONCENTRATOR; MICROTRENCHES; PPB; PRECISE MONITORING; PRECONCENTRATOR FOCUSERS; PYREX WAFERS; SENSITIVITY ENHANCEMENTS; SILICON STRUCTURES;

DESORPTION; ELECTRON BEAM LITHOGRAPHY; ETHYLENE; FOCUSING; FRUITS; GAS DETECTORS; MICROSYSTEMS; SENSORS;

SILICON WAFERS;

EID: 84862001742     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2012.2191952     Document Type: Article

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