A microfluidic preconcentrator for enhanced monitoring of ethylene gas

Sensors and Actuators, A: Physical

Volumn 167, Issue 2, 2011, Pages 226-230

  Dow, Ali Badar Alamin ^a   Sklorz, Adam ^a   Lang, W ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

Preconcentrator; Sensitivity enhancement; Thick silicon trenches

Indexed keywords

ANODIC BONDING; CARBOXEN; CLEAN AIR; DRIE PROCESS; ETHYLENE CONCENTRATION; ETHYLENE GAS; FABRICATED DEVICE; GLASS FRIT; MICROHEATER; PRE-CONCENTRATOR; PYREX GLASS; SENSITIVITY ENHANCEMENTS; SILICON MICROSTRUCTURES; SILICON STRUCTURES; SILICON TRENCH; THICK SILICON TRENCHES;

ADSORPTION; DESORPTION; GAS DETECTORS; GLASS; GLASS BONDING; MICROFLUIDICS; SUBSTRATES;

ETHYLENE;

EID: 79955887968     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.01.019     Document Type: Article

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