Fabrication of sensitivity tunable flexible force sensor via spray coating of graphite ink

IEEE Electron Device Letters

Volumn 33, Issue 6, 2012, Pages 902-904

  Akter, Tahmina ^a   Joseph, Justin ^a   Kim, Woo Soo ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

Force sensor; piezoresistive; spray deposited

Indexed keywords

ANISOTROPIC RESPONSE; APPLIED FORCES; DEPOSITED MATERIALS; FLEXIBLE FORCE; FORCE SENSOR; PIEZO-RESISTIVE; SPRAY COATING; SPRAY-DEPOSITED;

ELECTRON DEVICES; ELECTRONICS ENGINEERING;

SENSORS;

EID: 84861712509     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2012.2189932     Document Type: Article

References (18)

1. J. Ulmen and M. Cutkosky, "A robust, low-cost and low-noise artificial skin for human-friendly robots," in Proc. IEEE Int. Conf. Robot. Autom., 2010, pp. 4836-4841.
2. R. Bogue, "MEMS sensors: Past, present and future," Sens. Rev., vol. 27, no. 1, pp. 7-13, 2007.
3. K. D. Wise, "Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage," Sens. Actuators A, Phys., vol. 136, no. 1, pp. 39-50, May 2007. (Pubitemid 46590695)
4. M. Liu, J. Sun, and Q. Chen, "Influences of heating temperature on mechanical properties of polydimethylsiloxane," Sens. Actuators A, Phys., vol. 151, no. 1, pp. 42-45, Apr. 2009.
5. H. Gullapalli, V. Vemuru, A. Kumar, A. Botello-Mendez, R. Vajtai, M. Terrones, S. Nagarajaiah, and P.M. Ajayan, "Flexible piezoelectric ZnO-paper nanocomposite strain sensor," Small, vol. 6, no. 15, pp. 1641-1646, Aug. 2010.
6. C. Lin, L. Ko, J. Chiou, J. Duann, R. Huang, S. Liang, T. Chiu, and T. Jung, "Noninvasive neural prostheses using mobile and wireless EEG," Proc. IEEE, vol. 96, no. 7, pp. 1167-1183, Jul. 2008.
7. T. Bui, D. Dao, T. Toriyama, and S. Sugiyama, "Evaluation of the piezoresistive effect in single crystalline silicon nanowires," in Proc. IEEE Sens., 2009, pp. 41-44.
8. C. Hu, Y. Lin, C. Tang, M. Tsai,W. Hsu, and H. Kuo, "ZnO-Coated carbon nanotubes: Flexible piezoelectric generators," Adv. Mater., vol. 23, no. 26, pp. 2941-2945, Jul. 2011.
9. X. Liu, M. O'Brien, M. Mwangi, X. Li, and G. Whitesides, "Paperbased piezoresistive MEMS force sensor," in Proc. IEEE MEMS, 2011, pp. 133-136.
10. A. W. Martinez, S. T. Phillips, G. M. Whitesides, and E. Carrilho, "Diagnostics for the developing world: Microfluidic paper-based analytical devices," Anal. Chem., vol. 82, no. 1, pp. 3-10, Jan. 2010.
11. X. Liu, M. Mwang, X. Li, M. O'Brien, and G. Whitesides, "Paper-based piezoresistive MEMS sensors," Lab Chip, vol. 11, no. 13, pp. 2189-2196, 2011.
12. J. Krejci, J. Prasek, L. Fujcik, S. Khatib, E. Hejatkova, L. Jakubka, and L. Giannoudi, "Screen-printed sensors with graphite electrodes comparison of properties and physical method of sensitivity enhancement," Microelectron. Int., vol. 21, no. 3, pp. 20-25, 2004.
13. Y. Wu, Y. Li, and B. S. Ong, "Printed silver ohmic contacts for highmobility organic thin-film transistors," J Amer. Chem. Soc., vol. 128, no. 13, pp. 4202-4203, Apr. 2006.
14. N. Azarova, J. Owen, C. McLellan, M. A. Grimminger, E. K. Chapman, J. E. Anthony, and O. D. Jurchescu, "Fabrication of organic thin-film transistors by spray-deposition for low-cost, large-area electronics," Organic Electron., vol. 11, no. 12, pp. 1960-1965, Dec. 2010.
15. A. A. Barlian,W. T. Park, J. R. Mallon, Jr., A. J. Rastegar, and B. L. Pruitt, "Semiconductor piezoresistance for microsystems," Proc. IEEE, vol. 97, no. 3, pp. 513-552, Mar. 2009.
16. J. Rajagopalan, A. Tofangchi, and M. T. A. Saif, "Linear high-resolution BioMEMS force sensors with large measurement range," J. Microelectromech. Syst., vol. 19, no. 6, pp. 1380-1389, Dec. 2010.
17. A. C. Siegel, S. T. Phillips, M. D. Dickey, N. Lu, Z. Suo, and G. M. Whitesides, "Printable electronics: Foldable printed circuit boards on paper substrates," Adv. Funct. Mater., vol. 20, no. 1, pp. 28-35, Jan. 2010.
18. C. Young, J. Wu, and T. Tsou, "High-strength, ultra-thin and fiberreinforced pHEMA artificial skin," Biomaterials, vol. 19, no. 19, pp. 1745-1752, Oct. 1998. (Pubitemid 28523835)