Improvements and experimental validation of a 3D-probing system for micro-components

CIRP Annals - Manufacturing Technology

Volumn 61, Issue 1, 2012, Pages 475-478

  Liebrich, Thomas ^a   Knapp, Wolfgang ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Development; Metrology; Sensor

Indexed keywords

DEVELOPMENT; DIMENSIONAL METROLOGY; EXPERIMENTAL VALIDATIONS; FIZEAU INTERFEROMETERS; MICRO-COMPONENTS; PROBING SYSTEM;

LASER OPTICS; MEASUREMENTS; SENSORS; SPHERES; THREE DIMENSIONAL; UNITS OF MEASUREMENT;

STIFFNESS;

EID: 84861646732     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2012.03.107     Document Type: Article

References (6)

1. D. Dornfeld, S. Min, and Y. Takeuchi Recent Advances in Mechanical Micromachining Annals of the CIRP 55 2 2006 745 768
2. T. Liebrich, and W. Knapp New Concept of a 3D-Probing System for Micro-Components Annals of the CIRP 55 2 2010 745 768
3. A. Weckenmann, T. Estler, G. Peggs, and D. McMurtry Probing Systems in Dimensional Metrology Annals of the CIRP 53 2 2004 667 684
4. Schellekens P, Bos E, (2009), Aspects of tactile Micro and Nano Probing. CIRP Technical Report. CIRP 2009 Internal Documents and Reports, vol. 3, and CIRP STC-P 2009-01 Annex 6.1.2.
5. ISO 10360-5:2010, Geometrical Product Specifications (GPS) - Acceptance and Reverification Tests for Coordinate Measuring Machines (CMM) - Part 5: CMMs Using Single and Multiple Stylus Contacting Probing Systems.
6. A. Kueng, F. Meli, and R. Thalmann Ultraprecision Micro-CMM Using a Low Force 3D Touch Probe Measurement Science and Technology 18 2 2007 319 327