Integrated thin-film piezoelectric traveling wave ultrasonic motors

Sensors and Actuators, A: Physical

Volumn 188, Issue , 2012, Pages 305-311

  Smith, Gabriel L ^a   Rudy, Ryan Q ^a,b   Polcawich, Ronald G ^a   Devoe, Don L ^b  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

MEMS; Motor; Piezoelectric; PZT; Ultrasonic

Indexed keywords

BULK SILICON; CONTROL PURPOSE; ELASTIC MEDIUM; FINITE ELEMENT MODELS; HIGH TORQUE MOTORS; INTEGRATED APPROACH; LASER DOPPLER VIBROMETRY; LEAD ZIRCONATE TITANATE THIN FILMS; LOW POWER; MEMS FABRICATION TECHNIQUES; PIEZOELECTRIC; PZT; RESONANT MODE; SENSING APPLICATIONS; SMALL SCALE; STANDING WAVE; THIN FILM PIEZOELECTRIC; TRAVELING WAVE; TRAVELING WAVE ULTRASONIC MOTOR; ULTRASONIC MOTORS; WAFER SCALE;

ELECTRIC DRIVES; FABRICATION; FINITE ELEMENT METHOD; LASER DOPPLER VELOCIMETERS; MEMS; MOTORS; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; SILICON WAFERS; STATORS; ULTRASONIC EQUIPMENT; ULTRASONIC MACHINE TOOLS; ULTRASONICS;

PIEZOELECTRIC MOTORS;

EID: 84861561417     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.12.029     Document Type: Conference Paper

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